Micro-material-test mechanism oriented precision technique
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摘要: 微机电系统(MEMS,Micro Electromechanical Systems)在航空航天、汽车、生物医学、环境监控、军事等领域中有着广泛的应用前景.其材料力学性能的测试目前是其性能测试的薄弱环节,它涉及到微位移、精密定位和载荷/位移测量.采用传统"机械"制造技术,由于摩擦、间隙、爬行和多环节传动误差积累等原因而无法实现.为此,提出了一种冗余驱动全柔性并联机构和压电陶瓷驱动器所组成的新型测量平台.在推导4RRR冗余驱动并联机构运动学逆问题方程的基础上,经过最佳拓扑选择、运动学分析,并基于动力学优化,确定了微位移/精密定位运动平台主要结构尺寸.实验表明:采用该平台,可以满足MEMS材料力学性能测量所需的微位移和精确定位要求.Abstract: Micro electromechanical systems(MEMS) have vast vistas of application in the aeronautics, astronautics, automobile, bioengineering, environmental management, military, etc. However, the material tests are the bottleneck of the property test for MEMS. That is concerned with subtle motion, precision location, and the measurement of tiny load/displacement. Traditional mechanical manufacture is helpless for the mission duo to friction, clearance, crawl, and error-accumulation of multi-transmission. For this reason, a new type of the redundantly actuated compliant parallel mechanism with piezoelectric actuators was proposed. Based on the inverse kinematics of the redundantly actuated compliant parallel mechanism, and by means of optimum topology, kinematical analysis, and dynamical optimization, the key dimensions of the mechanism were determined. The experiment demonstrates the mechanism is capable in the subtle motion, precision location, and the measurement of tiny load/displacement for the MEMS material test.
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