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基于CCR带并行腔双集束型设备调度方法

周炳海 黎明

周炳海, 黎明. 基于CCR带并行腔双集束型设备调度方法[J]. 北京航空航天大学学报, 2016, 42(7): 1361-1367. doi: 10.13700/j.bh.1001-5965.2015.0538
引用本文: 周炳海, 黎明. 基于CCR带并行腔双集束型设备调度方法[J]. 北京航空航天大学学报, 2016, 42(7): 1361-1367. doi: 10.13700/j.bh.1001-5965.2015.0538
ZHOU Binghai, LI Ming. Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource[J]. Journal of Beijing University of Aeronautics and Astronautics, 2016, 42(7): 1361-1367. doi: 10.13700/j.bh.1001-5965.2015.0538(in Chinese)
Citation: ZHOU Binghai, LI Ming. Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource[J]. Journal of Beijing University of Aeronautics and Astronautics, 2016, 42(7): 1361-1367. doi: 10.13700/j.bh.1001-5965.2015.0538(in Chinese)

基于CCR带并行腔双集束型设备调度方法

doi: 10.13700/j.bh.1001-5965.2015.0538
基金项目: 国家自然科学基金(71471135,61273035)
详细信息
    作者简介:

    周炳海 男,博士,教授,博士生导师。主要研究方向:制造系统调度、建模与仿真评价,设备可靠性与预防性维护建模。Tel: 021-54810409 E-mail:bhzhou@tongji.edu.cn;黎明 男,硕士研究生。主要研究方向:半导体制造系统生产调度、建模与仿真评价。

    通讯作者:

    周炳海,Tel.: 021-54810409 E-mail: bhzhou@tongji.edu.cn

  • 中图分类号: F270;TP391

Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource

  • 摘要: 为有效解决450mm晶圆制造中带有并行处理腔的集束型设备群调度问题,提出了基于产能约束资源(CCR)的调度方法。首先,综合考虑多品种加工、晶圆驻留和资源约束等特征,以系统总完工时间最小作为目标,建立带并行腔双集束型设备调度数学模型;其次,为优化机械手作业顺序,对CCR实施锁定-收紧-松弛(LTL)策略,构建了一种以CCR为界的分段调度算法;最后,进行了仿真实验分析。结果表明本文提出的算法是有效和有竞争性的。

     

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出版历程
  • 收稿日期:  2015-08-24
  • 网络出版日期:  2016-07-20

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