150 kV逆变电源性能优化及其束源特性

许海鹰; 桑兴华; 张伟; 齐铂金

doi:10.13700/j.bh.1001-5965.2016.0651

150 kV逆变电源性能优化及其束源特性

doi: 10.13700/j.bh.1001-5965.2016.0651

1.
北京航空制造工程研究所高能束流加工技术重点实验室, 北京 100024
2.
北京航空航天大学机械工程及自动化学院, 北京 100083

基金项目:

工信部基金

详细信息

作者简介:
许海鹰男, 博士, 高级工程师。主要研究方向:高能束设备技术

通讯作者:
许海鹰, E-mail: xhyxhy@126.com

中图分类号: TM924.16;TG439.3
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- 被引次数: 0
出版历程
- 收稿日期: 2016-08-08
- 录用日期: 2017-01-07
- 网络出版日期: 2017-08-20

Performance optimization for 150 kV inverter power supply and its electron beam source characteristics

1.
Science and Technology on Power Beam Processes Laboratory, Beijing Aeronautical Manufacturing Technology Research Institute, Beijing 100024, China
2.
School of Mechanical Engineering and Automation, Beijing University of Aeronautics and Astronautics, Beijing 100083, China

Funds:

MIIT Fund

More Information

Corresponding author: XU H Y, E-mail: xhyxhy@126.com

摘要

摘要:
为了进一步提高电子束流发生系统工作的可靠性和稳定性，提高电子束加工质量，采用AC-DC-AC-DC-AC-DC的拓扑电路、新型功率变压器、高压脉冲检测技术、优化的束流反馈控制与灯丝加热电流闭环反馈控制技术等，分别优化了高压加速电源、偏压电源与灯丝加热电源。将所研制逆变电源与150 kV/30 kW电子枪、真空系统等组成了一套电子束流发生系统，测试了该电子束流发生系统输出的高压、最大束流以及灯丝加热电流、偏压变化对束流输出的影响。试验结果表明：经过优化的逆变电源高压输出达到-150 kV，高压输出线性度较好，最大束流达到200 mA；高压、灯丝加热电流给定时，随着偏压降低，束流输出逐渐增大；高压、偏压给定时，随着灯丝加热电流增大，束流输出存在死区、线性增大区和恒流区。
- 逆变电源 /
- 高压 /
- 电子束 /
- 偏压 /
- 灯丝加热电流
Abstract:
In order to enhance the stability and reliability of electron beam source system and improve the machining quality of electron beam, the topology circuit of AC-DC-AC-DC-AC-DC, new power transformer, high voltage pulse detection technology, optimized feedback control technology of electron beam and closed-loop control technology of filament current are introduced to optimize high voltage power source, bias voltage power source and filament power source. The inverter power supply, 150 kV/30 kW EB gun, vacuum system and others control system were integrated to establish a set of electron beam system. The high voltage, maximal electron beam output, and the influence of bias voltage and filament current on beam output are tested. The results of a series of tests show that the high voltage output of the inverter power supply has a fine linearity, and the maximum beam output is up to 200 mA at the high voltage output up to-150 kV. At given high voltage and current of filament, the electron beam will increase with the decrease of bias voltage. When the high voltage and bias voltage are given changeless, the electron beam output experiences non-beam phase, linear increasable phase and steady changeless phase with the increase of filament current.
- inverter power supply /
- high voltage /
- electron beam /
- bias voltage /
- filament heating current

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图 1 电子束流发生系统

Figure 1. Generation system of electron beam

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图 2 加速电源拓扑电路

Figure 2. Topology circuit of accelerator power supply

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图 3 高压功率变压器绕制方式

Figure 3. Coiling methods of high voltage power transformers

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图 4 偏压电源拓扑电路

Figure 4. Topology circuit of bias voltage power supply

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图 5 高压采样电路

Figure 5. High voltage sampling circuit

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图 6 束流反馈控制电路框图

Figure 6. Block diagram of beam feedback control circuit

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图 7 灯丝加热电流闭环反馈控制电路框图

Figure 7. Block diagram of closed-loop control circuit of filament heating current

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图 8 空载时逆变电路输出波形与反馈高压信号

Figure 8. Inverter circuit output waveform and feedback high voltage signal with no load

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图 9 空载时高压加速电源输出特性

Figure 9. Output characteristics of high voltage accelerator power supply with no load

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图 10 带载时高压功率变压器原边电压、电流及束流采样波形

Figure 10. Waveform of voltage and current in original coils of high voltage power transformer and sample signal of beam current in load

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图 11 偏压与束流输出对应关系曲线

Figure 11. Corresponding relational curve between bias voltage and beam output

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图 12 灯丝加热电流与束流输出对应关系曲线

Figure 12. Corresponding relational curves between filament current and beam output

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