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�������պ����ѧѧ�� 2010, Vol. 36 Issue (3) :328-332    DOI:
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1. �������պ����ѧ �Զ�����ѧ���������ѧԺ, ���� 100191;
2. ���пƼ���ѧ ��е��ѧ�빤��ѧԺ, �人430074;
3. ������ҵ��ѧ ���繤��ѧԺ, ����100144
Micro-material-test mechanism oriented precision technique
Lu Zhen1, Chen Xuedong2, He Guangping3*
1. School of Automation Science and Electrical Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100191, China;
2. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;
3. College of Mechanical Electronical Engineering, North University of Technology, Beijing 100144, China

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ժҪ ΢����ϵͳ(MEMS,Micro Electromechanical Systems)�ں��պ��졢����������ҽѧ��������ء����µ����������Ź㷺��Ӧ��ǰ��.�������ѧ���ܵIJ���Ŀǰ�������ܲ��Եı�������,���漰��΢λ�ơ����ܶ�λ���غ�/λ�Ʋ���.���ô�ͳ"��е"���켼��,����Ħ������϶�����кͶ໷�ڴ��������۵�ԭ����޷�ʵ��.Ϊ��,�����һ����������ȫ���Բ���������ѹ���մ�����������ɵ����Ͳ���ƽ̨.���Ƶ�4RRR�����������������˶�ѧ�����ⷽ�̵Ļ�����,�����������ѡ���˶�ѧ����,�����ڶ���ѧ�Ż�,ȷ����΢λ��/���ܶ�λ�˶�ƽ̨��Ҫ�ṹ�ߴ�.ʵ�����:���ø�ƽ̨,��������MEMS������ѧ���ܲ��������΢λ�ƺ;�ȷ��λҪ��.
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Abstract�� Micro electromechanical systems(MEMS) have vast vistas of application in the aeronautics, astronautics, automobile, bioengineering, environmental management, military, etc. However, the material tests are the bottleneck of the property test for MEMS. That is concerned with subtle motion, precision location, and the measurement of tiny load/displacement. Traditional mechanical manufacture is helpless for the mission duo to friction, clearance, crawl, and error-accumulation of multi-transmission. For this reason, a new type of the redundantly actuated compliant parallel mechanism with piezoelectric actuators was proposed. Based on the inverse kinematics of the redundantly actuated compliant parallel mechanism, and by means of optimum topology, kinematical analysis, and dynamical optimization, the key dimensions of the mechanism were determined. The experiment demonstrates the mechanism is capable in the subtle motion, precision location, and the measurement of tiny load/displacement for the MEMS material test.
Keywords�� micro electromechanical systems   redundantly actuated   compliant mechanism.     
Received 2009-03-02;
Fund:

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About author: ½ ��(1942-),��,����������,����,zhenluh@buaa.edu.cn.
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½ ��, ��ѧ��, �ι�ƽ .�����������΢�������Լ�����[J]  �������պ����ѧѧ��, 2010,V36(3): 328-332
Lu Zhen, Chen Xuedong,He Guangping.Micro-material-test mechanism oriented precision technique[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2010,V36(3): 328-332
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