北京航空航天大学学报 ›› 2017, Vol. 43 ›› Issue (11): 2199-2206.doi: 10.13700/j.bh.1001-5965.2017.0055

• 先进测量手段 • 上一篇    下一篇

铝基微结构光栅几何参数反演

孙双成1, 齐宏1, 孙建平1, 阮世庭2, 吕中原1, 阮立明1   

  1. 1. 哈尔滨工业大学 能源科学与工程学院, 哈尔滨 150001;
    2. 上海卫星工程研究所, 上海 201100
  • 收稿日期:2017-02-13 修回日期:2017-06-07 出版日期:2017-11-20 发布日期:2017-09-18
  • 通讯作者: 齐宏 E-mail:qihong@hit.edu.cn
  • 作者简介:孙双成,男,博士研究生。主要研究方向:辐射传输逆问题及智能优化算法;齐宏,男,博士,教授,博士生导师。主要研究方向:热辐射传输与耦合换热、高温弥散颗粒辐射物性及温度测量、辐射传输逆问题及智能优化算法、微藻新能源利用。
  • 基金资助:
    国家自然科学基金(51476043)

Inverse estimation of geometric parameters of aluminum matrix microscale structure grating

SUN Shuangcheng1, QI Hong1, SUN Jianping1, RUAN Shiting2, LYU Zhongyuan1, RUAN Liming1   

  1. 1. School of Energy Science and Engineering, Harbin Institute of Technology, Harbin 150001, China;
    2. Shanghai Satellite Engineering Research Institute, Shanghai 201100, China
  • Received:2017-02-13 Revised:2017-06-07 Online:2017-11-20 Published:2017-09-18
  • Supported by:
    National Natural Science Foundation of China (51476043)

摘要: 微结构光栅是一种广泛应用的电子元件。采用随机微粒群优化(SPSO)算法反演了一维铝基衬底矩形光栅的几何结构参数。首先介绍了严格耦合波分析(RCWA)法和微粒群优化算法的基本原理,并采用RCWA法求解了光栅内电磁场问题;然后根据正问题求得的光栅光谱反射率建立目标函数,并采用SPSO算法优化目标函数,反演得到单槽和双槽矩形光栅的周期、凸脊宽度和凹槽深度;最后分析了种群大小和搜索区间对反演结果的影响。结果表明,SPSO算法可以准确地反演光栅几何结构参数,并推荐种群数取30。

关键词: 光栅结构反演, 随机微粒群优化(SPSO)算法, 严格耦合波分析(RCWA)法, 光谱反射率, 辐射特性

Abstract: Micro structure grating is a widely used electronic component. The geometric parameters of one-dimensional rectangular aluminum matrix grating are inversely estimated using stochastic particle swarm optimization (SPSO) algorithm. The theoretical overview of rigorous coupled wave analysis (RCWA) algorithm and particle swarm optimization algorithm is introduced, and RCWA algorithm is employed to solve the electromagnetic field problem within grating. The objective function is formulated based on the spectral reflectance obtained by the direct problem, and then the SPSO algorithm is used to optimize the objective function. The geometric parameters such as the grating period, ridge width and groove depth are retrieved simultaneously. The effects of population size and searching space on the inverse estimation results are also investigated. The retrieval results show that SPSO algorithm is effective and robust for estimating geometric parameters of grating and the population size is suggested as 30.

Key words: inverse estimation of grating structure, stochastic particle swarm optimization (SPSO) algorithm, rigorous coupled wave analysis (RCWA) algorithm, spectral reflectance, radiative property

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