北京航空航天大学学报 ›› 2009, Vol. 35 ›› Issue (3): 384-388.

• 论文 • 上一篇    下一篇

电容式微加速度计闭环检测电路

宋 星, 房建成, 盛 蔚   

  1. 北京航空航天大学 仪器科学与光电工程学院, 北京 100191
  • 收稿日期:2008-03-19 出版日期:2009-03-31 发布日期:2010-09-16
  • 作者简介:宋 星(1983-), 男,湖北赤壁人,硕士生,songxing2003@gmail.com.
  • 基金资助:

    国防基础科研资助项目(D2120060013); 国家自然科学基金资助项目(60736025)

Circuit for close-loop capacitive micro-accelerometers

Song Xing, Fang Jiancheng, Sheng Wei   

  1. School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100191, China
  • Received:2008-03-19 Online:2009-03-31 Published:2010-09-16

摘要: 针对硅微惯性器件中的微小差分电容检测,提出了一种应用于三明治结构差分电容式微机械加速度计的闭环检测电路.通过等电势屏蔽法,相干解调技术和增加激励信号对称性等技术屏蔽杂散电容,抑制了电路噪声和共模误差,提高了检测电路的微弱信号辨识能力;静电力平衡闭环检测克服了开环输出信号的非线性缺陷,实现了高线性度、高分辨率的电容检测.设计的闭环检测电路具有电路简单、线性度好、抗干扰性强和易于集成的特点.实验结果表明,加速度计量程可达±15g,电容分辨率可达10-16F.

Abstract: A circuit to detect the micro-differential capacitance of micro-silicon inertia sensors was designed,which can be successfully applied in the capacitive MEMS(micro electro mechanical system) accelerometer,especially in the sandwich structure MEMS accelerometers with differential capacitance.The good linearity in large measurement range and high capacitance resolution was achieved by restraining common-mode noise, bias voltage and nonlinearity of voltage output using technologies, such as improving symmetry of rectangle wave source, equi-potential shielding action, coherent demodulation and electrostatic re-balance. The circuit is simple, its linearity, and ability of anti-disturbance are good, and it could be integrated easily. Experiment results show that the measurement range of the accelerometer is ±15g and the capacitance resolution can reach 10-16F.

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