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3-PPP型柔性并联微定位平台的设计与分析

王保兴 孟刚 林苗 李巍 曹毅

王保兴, 孟刚, 林苗, 等 . 3-PPP型柔性并联微定位平台的设计与分析[J]. 北京航空航天大学学报, 2020, 46(4): 798-807. doi: 10.13700/j.bh.1001-5965.2019.0286
引用本文: 王保兴, 孟刚, 林苗, 等 . 3-PPP型柔性并联微定位平台的设计与分析[J]. 北京航空航天大学学报, 2020, 46(4): 798-807. doi: 10.13700/j.bh.1001-5965.2019.0286
WANG Baoxing, MENG Gang, LIN Miao, et al. Design and analysis of a 3-PPP compliant parallel micro-positioning stage[J]. Journal of Beijing University of Aeronautics and Astronautics, 2020, 46(4): 798-807. doi: 10.13700/j.bh.1001-5965.2019.0286(in Chinese)
Citation: WANG Baoxing, MENG Gang, LIN Miao, et al. Design and analysis of a 3-PPP compliant parallel micro-positioning stage[J]. Journal of Beijing University of Aeronautics and Astronautics, 2020, 46(4): 798-807. doi: 10.13700/j.bh.1001-5965.2019.0286(in Chinese)

3-PPP型柔性并联微定位平台的设计与分析

doi: 10.13700/j.bh.1001-5965.2019.0286
基金项目: 

江苏省“六大人才高峰”计划 ZBZZ-012

高等学校学科创新引智计划 B18027

江苏省研究生创新计划 SJCX18-0630

江苏省研究生创新计划 KYCX18-1846

详细信息
    作者简介:

    王保兴  男, 硕士研究生。主要研究方向:柔性机构学

    孟刚  男, 硕士研究生。主要研究方向:柔性机构学

    林苗  男, 硕士研究生。主要研究方向:柔性机构学

    李巍  男, 博士。主要研究方向:软体机器人

    曹毅  男, 博士, 教授。主要研究方向:并联机器人、混联机器人、柔性机器人、软体机器人

    通讯作者:

    曹毅, E-mail: caoyi@jiangnan.edu.cn

  • 中图分类号: V414.5;TH122

Design and analysis of a 3-PPP compliant parallel micro-positioning stage

Funds: 

The Six Talent Peaks Project in Jiangsu Province ZBZZ-012

"111" Project B18027

Postgraduate Research and Practice Innovation Program of Jiangsu Provence SJCX18-0630

Postgraduate Research and Practice Innovation Program of Jiangsu Provence KYCX18-1846

More Information
  • 摘要:

    为解决现有空间平动柔性并联微定位平台(CPMS)结构布局不紧凑,且多轴驱动时各运动副的寄生运动相互累加,导致平台耦合误差增大的问题。首先,设计了一种基于柔性薄板的分布柔度式3-PPP型柔性并联微定位平台。其次,通过结构优化减小了平台的体积,并消除了支链中移动副寄生运动的累加现象。然后,基于柔度矩阵法建立了平台的输入刚度理论模型,并采用有限元仿真验证了理论模型的正确性;同时计算了平台的固有频率,并探究了其与柔性薄板尺寸参数之间的关系。最后,将结构优化前后的平台通过有限元仿真进行了对比分析。结果表明:结构优化后平台的体积减小了67%,且平台在单轴和多轴驱动时均具有更优的运动解耦特性和输入输出一致性。

     

  • 图 1  3-PPP型柔性并联微定位平台的初始结构

    Figure 1.  Original structure of a 3-PPP compliant parallel micro-positioning stage

    图 2  支链3中被动副的变形示意图

    Figure 2.  Schematic diagram of deformation of passive joints in limb 3

    图 3  反向串联方法示意图

    Figure 3.  Schematic diagram of inversion series method

    图 4  结构优化后的柔性支链

    Figure 4.  One compliant limb after structure optimization

    图 5  结构优化后的微定位平台

    Figure 5.  Micro-positioning stage after structure optimization

    图 6  一端固定的等截面梁

    Figure 6.  A constant section beam with one end fixed

    图 7  z轴方向的柔性支链

    Figure 7.  Compliant limb in z-axis direction

    图 8  驱动力为50 N时平台的仿真结果

    Figure 8.  Simulation result of stage with 50 N actuating force

    图 9  驱动力与参考点位移之间的关系

    Figure 9.  Relationship between actuating force and reference point displacement

    图 10  平台的1~6阶模态振型

    Figure 10.  1-6 order mode shapes of stage

    图 11  平台的固有频率与柔性薄板尺寸参数之间的关系

    Figure 11.  Relationship between natural frequency of stage and compliant sheet size parameters

    图 12  不同输入条件下平台的仿真分析

    Figure 12.  Simulation analysis of stage under different input conditions

    图 13  单轴驱动条件下的仿真结果

    Figure 13.  Simulation results with single-axis actuation

    图 14  两轴驱动时平台在z轴方向的耦合位移

    Figure 14.  Coupling displacement of stage in z-axis direction with two-axis actuation

    图 15  三轴驱动时平台的丢失运动

    Figure 15.  Lost motion of stage with three-axis actuation

    表  1  平台的尺寸参数

    Table  1.   Dimension parameters of stage

    参数 数值/mm
    t 0.5
    w 25
    l 40
    H 59
    u1 45.5
    u2 28.5
    s 44
    下载: 导出CSV

    表  2  参考点位移的矩阵法计算值、仿真值及相对误差

    Table  2.   Matrix method calculation values, simulation values and relative error of reference point displacement

    驱动力/N 参考点位移/μm 相对误差/%
    理论计算值 仿真值
    10 70.74 73.15 3.41
    20 141.47 143.36 1.33
    30 212.21 208.78 1.62
    40 282.94 268.73 5.02
    50 353.68 323.36 8.57
    下载: 导出CSV

    表  3  参考点位移非线性法计算值、仿真值及相对误差

    Table  3.   Nonlinear method calculation values, simulation values and relative error of reference point displacement

    驱动力/N 参考点位移/μm 相对误差/%
    理论计算值 仿真值
    10 70.1 73.15 4.35
    20 136.9 143.36 4.72
    30 198.3 208.78 5.28
    40 253.8 268.73 5.88
    50 303.7 323.36 6.47
    下载: 导出CSV

    表  4  平台有限元分析的固有频率

    Table  4.   Natural frequency of stage obtained by finite element analysis

    阶数 1阶 2阶 3阶 4阶 5阶 6阶
    频率/Hz 94.49 94.49 94.49 694.13 700 700.13
    下载: 导出CSV

    表  5  单轴驱动时参考点的耦合位移与丢失运动

    Table  5.   Coupling displacement and lost motion of reference point with single-axis actuation  μm

    平台结构 y轴方向的最大耦合位移 z轴方向的最大耦合位移 x轴方向的最大丢失运动
    初始结构 -1.08 -1.09 0.45
    优化后的结构 -1.04 0.85 0.23
    下载: 导出CSV
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出版历程
  • 收稿日期:  2019-06-10
  • 录用日期:  2019-08-30
  • 网络出版日期:  2020-04-20

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