An automatic focusing system of micro-vision for micro alignment assembly was developed. The system was based on spatial domain analysis. First-order differential operator in ��y�� direction was choosed as focusing evaluation function to realize autofocus quickly and accurately. Processing the image in a choosed focusing window was presented to optimize focusing effect. A new focusing algorithm was put forward, which is different from hill climbing searching algorithm(HCSA). The key factor of the algorithm is establishing the relation between defocus values and focusing evaluation. Cubic spline interpolation was adopted to establish focusing relation function to realize the algorithm effectively. It proves the system can realize autofocus accurately and quickly.
Sun Minglei, Zong Guanghua, Yu Zhiwei, Bi Shusheng, Yu Jingjun.Automatic focusing system of micro-vision based on image analysis[J] JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2005,V31(02): 192-196
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