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�������պ����ѧѧ�� 2005, Vol. 31 Issue (03) :331-335    DOI:
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Closed-loop system of silicon resonant pressure micro-sensor
Li Haijuan, Zhou Haomin*
School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China

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Abstract�� When the silicon resonant pressure micro-sensor works in the self-oscillation close-loop system with thermal-excited and resistor detected, its output has a problem of dreadfully weak signal of micro-sensor. SNR( signal noise ratio) is as low as 10-3, for the system used frequency-equaled signal to excite micro-sensor to get its syntony, as well caused the damaging coupling disturbance. PLL(phase-locked loop) principle and frequency-divided technique were used to design the double closed-loop control circuit of micro-sensor to avoid those. Micro-sensor worked in the outside loop and PLL made the inside loop. The frequency output of micro-sensor had frequency-equaled exciting signal and duple frequency true signal, after multilevel power amplification multiplied duple frequency output of PLL to achieve frequency dividing, adjusting the system state parameters made closed-loop available and phase locking. Results show that the closed-loop system of micro-sensor works effectively based PLL principle and frequency-divided technique and the low SNR gets developed.
Keywords�� sensors   closed loop control systems   phase locked loops   resonant     
Received 2003-08-27;
Fund:

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About author: ���(1979-),Ů,�㶫�ع���,˶ʿ��, luckxiami@263.net.
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���, �ܺ���.��г��ʽѹ��΢�������ջ�ϵͳ[J]  �������պ����ѧѧ��, 2005,V31(03): 331-335
Li Haijuan, Zhou Haomin.Closed-loop system of silicon resonant pressure micro-sensor[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2005,V31(03): 331-335
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