By Raman spectroscopy, high-resolution electron microscope and atomic force microscope, the structure of phosphorus-doped hydrogenated nano-crystalline silicon films (nc-Si (P)��H) was analyzed The films possess orderly arranged cluster feature in the size of 15~20nm. The films are composed of nano-crystalline grain and amorphous silicon, the crystalline volume fraction of the films is 40��~55��, the average grain size is between 2 and 4?nm. The grain size, the crystalline volume fraction and the conductivity of the nc-Si (P)��H increase as the doping concentration is increased. Compared with undoped hydrogenated nano-crystalline silicon films, the conductivity of nc-Si(P)��H is increased almost 2 orders. Possible connection between the ordered cluster characteristics and the higher conductivity was finally appointed.
YU Xiao-mei, WANG Jin-liang, JIANG Xing-liu, WANG Tian-min.Structure Characteristics of Phosphorus��Doped Hydrogenated Nano��Crystalline Silicon Films[J] JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2002,V28(5): 547-549