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�������պ����ѧѧ�� 2002, Vol. 28 Issue (5) :547-549    DOI:
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Structure Characteristics of Phosphorus��Doped Hydrogenated Nano��Crystalline Silicon Films
YU Xiao-mei, WANG Jin-liang, JIANG Xing-liu, WANG Tian-min*
Beijing University of Aeronautics and Astronautics, School of Science

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ժҪ ��������(Raman)ɢ���ס��߷ֱ��ʵ�����΢��(HRTEM)��ԭ������΢��(AFM)�Բ������׹象Ĥ��΢�ṹ�����˷���,�������׹象Ĥ�Ĵ������ƽ�����̽��.�������:�������׹象Ĥ�ɳߴ�Ϊ2~4nm�ľ�����2~3��ԭ�Ӳ��ķǾ����湹��,����õ���Ĥ�ľ�̬��Ϊ40��~55��.�뱾�����׹象Ĥ���,�������׹象Ĥ�����ߴ�;�̬��û�����Ա仯,�絼��ȴ�����2��������.���Ų���Ũ������,���׹象Ĥ�ľ����ߴ硢��̬�ȼ��絼��������.AFM�۲�����������׹象Ĥ�ɳߴ����15~20nm���Ŵع���,�Ŵ����о��д�״����.
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Abstract�� By Raman spectroscopy, high-resolution electron microscope and atomic force microscope, the structure of phosphorus-doped hydrogenated nano-crystalline silicon films (nc-Si (P)��H) was analyzed The films possess orderly arranged cluster feature in the size of 15~20nm. The films are composed of nano-crystalline grain and amorphous silicon, the crystalline volume fraction of the films is 40��~55��, the average grain size is between 2 and 4?nm. The grain size, the crystalline volume fraction and the conductivity of the nc-Si (P)��H increase as the doping concentration is increased. Compared with undoped hydrogenated nano-crystalline silicon films, the conductivity of nc-Si(P)��H is increased almost 2 orders. Possible connection between the ordered cluster characteristics and the higher conductivity was finally appointed.
Keywords�� silicon films   grains   microscopes   cluster     
Received 2001-01-16;
About author: ����÷(1961-),Ů,����������,������,100083,����.
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����÷, ������, ������, ������.�������׹象Ĥ��΢�ṹ[J]  �������պ����ѧѧ��, 2002,V28(5): 547-549
YU Xiao-mei, WANG Jin-liang, JIANG Xing-liu, WANG Tian-min.Structure Characteristics of Phosphorus��Doped Hydrogenated Nano��Crystalline Silicon Films[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2002,V28(5): 547-549
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