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�������պ����ѧѧ�� 1998, Vol. 24 Issue (4) :475-478    DOI:
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Study on CAD/CAE System Architecture Supporting MEMS
Kang Jianchu, Yin Baolin, Gao Peng*
Beijing University of Aeronautics and Astronautics,Dept. of Computer Science and Engineering

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ժҪ CAD/CAE������MEMS(Micro Electro Mechanical Systems)�о������о��зdz���Ҫ������.�������Ƚ���������MEMS��CAD/CAE�����ص�,Ȼ���о���MEMS CAD/CAEϵͳ�ṹ,���������֧�ֹ��߽ṹ��ͼ,ָ���˽�����йؼ�������;��.CAD/CAE������Ӧ��,�����΢�ͻ���ϵͳ���������,������������,ʹ֮��������ҵ��.
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Abstract�� CAD/CAE technique plays an important role in MEMS(Micro Electro Mechanical Systems) research, while MEMS CAD/CAE shares some common techniques with conventional CAD/CAE systems, it is also different in many ways.The characteristics of CAD/CAE techniques supporting MEMS were introduced firstly, then the system architecture of MEMS CAD/CAE was studied, the structure frame of software supporting tool was presented and the ways for solving the key techniques were expounded. The application of CAD/CAE technique will improve the design quality and shorten the research time of micro electro-mechanical systems. As a result, it will lead to industrialization of MEMS sooner.
Keywords�� CAD   system architecture   softwave tools   MEMS(Micro Electro Mechanical Systems)   CAE     
Received 1998-06-15;


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������, ������, ����.֧��MEMS��CAD/CAEϵͳ�ṹ�о�[J]  �������պ����ѧѧ��, 1998,V24(4): 475-478
Kang Jianchu, Yin Baolin, Gao Peng.Study on CAD/CAE System Architecture Supporting MEMS[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 1998,V24(4): 475-478
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