北京航空航天大学学报 ›› 1998, Vol. 24 ›› Issue (4): 475-478.

• 论文 • 上一篇    下一篇

支持MEMS的CAD/CAE系统结构研究

康建初, 尹宝林, 高鹏   

  1. 北京航空航天大学 计算机科学与工程系
  • 收稿日期:1998-06-15 出版日期:1998-04-30 发布日期:2010-09-29
  • 作者简介:女 45岁 副教授 100083 北京
  • 基金资助:

    国防科工委"九五"预研基金(8.7.1.8)资助项目

Study on CAD/CAE System Architecture Supporting MEMS

Kang Jianchu, Yin Baolin, Gao Peng   

  1. Beijing University of Aeronautics and Astronautics,Dept. of Computer Science and Engineering
  • Received:1998-06-15 Online:1998-04-30 Published:2010-09-29

摘要: CAD/CAE技术在MEMS(Micro Electro Mechanical Systems)研究过程中具有非常重要的作用.本文首先介绍了用于MEMS的CAD/CAE技术特点,然后研究了MEMS CAD/CAE系统结构,给出了软件支持工具结构框图,指明了解决其中关键技术的途径.CAD/CAE技术的应用,将提高微型机电系统的设计质量,缩短研制周期,使之及早走向工业化.

Abstract: CAD/CAE technique plays an important role in MEMS(Micro Electro Mechanical Systems) research, while MEMS CAD/CAE shares some common techniques with conventional CAD/CAE systems, it is also different in many ways.The characteristics of CAD/CAE techniques supporting MEMS were introduced firstly, then the system architecture of MEMS CAD/CAE was studied, the structure frame of software supporting tool was presented and the ways for solving the key techniques were expounded. The application of CAD/CAE technique will improve the design quality and shorten the research time of micro electro-mechanical systems. As a result, it will lead to industrialization of MEMS sooner.

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