北京航空航天大学学报

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考虑柔性单元界面关联特性的微动平台刚度分析与修正方法

宫金良,郑洋洋,张彦斐   

  1. 山东理工大学
  • 收稿日期:2016-12-28 修回日期:2017-02-22 发布日期:2017-04-07
  • 通讯作者: 宫金良
  • 基金资助:
    国家自然科学基金;山东省优秀中青年科学家科研奖励基金

Rigidity analysis and revision method of micro-motion platform considering the interface relevance characteristics between flexible units

  • Received:2016-12-28 Revised:2017-02-22 Published:2017-04-07

摘要: 随着加工制造精度的不断提高,制造领域中所采用的尺度正由微米迈向纳米,高精度、大行程成为柔性机构的研究热点,而刚度是决定柔性机构定位精度的重要指标。设计了一种含折叠梁的并联微定位平台,具有大行程低阻力的特点。采用传递矩阵法求解其刚度,建立各柔性子单元的传递矩阵,利用相邻单元公共结点实现传递性,通过力平衡方程、变形协调方程求解其末端位移与输入力之间的刚度矩阵,并提出了考虑全柔性的弹性折叠梁及弹性移动副刚度的求解方法。将传递矩阵法求解结果与有限元分析结果对比,误差在16%以内,在此基础上,考虑到模块化刚度分析方法将各子单元视为独立体,忽略了各子单元之间的界面关联性,提出一种根据各子单元界面关联特性进行修正的方法,结果表明使其误差降低到10%以内,更好的满足了实际工程需求。

关键词: 柔性机构, 刚度, 传递矩阵, 界面关联特性, 修正方法

Abstract: With the improvement of manufacturing precision, the dimensions used in manufacturing are moving from microns to nanometers. High precision, large stroke of flexible mechanism paid much attention. Rigidity is an important performance index for the flexible mechanism which affects the positioning precision. A parallel micro-positioning platform with folded beams was designed, with characteristics of large stroke and low resistance. Stiffness was solved by transfer matrix method. First, establish transfer matrix of flexible unit, then combine each unit by transfer matrix. Last, establish the relationship between input force and output displacement model of flexible mechanism according to the force balance equation and compatibility equation of deformation. A method to solve the stiffness of compliant folded beam and compliant prismatic pair considering full flexibility was put forward. The results of deformation error is less than 16% compared with finite element analysis. Then on this basis, this method ignored the correlation between the subunits, because of the modular stiffness analysis method was regarded each subunit as independent. A modified method of consider each subunit dependency was put forward, reduce the error to less than 10% and made the results better meet the actual engineering needs.

Key words: flexible mechanism, stiffness, transfer matrix, interface relevance characteristics, revision method


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