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�������պ����ѧѧ�� 2009, Vol. 35 Issue (3) :384-388    DOI:
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Circuit for close-loop capacitive micro-accelerometers
Song Xing, Fang Jiancheng, Sheng Wei*
School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100191, China

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Abstract�� A circuit to detect the micro-differential capacitance of micro-silicon inertia sensors was designed,which can be successfully applied in the capacitive MEMS(micro electro mechanical system) accelerometer,especially in the sandwich structure MEMS accelerometers with differential capacitance��The good linearity in large measurement range and high capacitance resolution was achieved by restraining common-mode noise, bias voltage and nonlinearity of voltage output using technologies, such as improving symmetry of rectangle wave source, equi-potential shielding action, coherent demodulation and electrostatic re-balance. The circuit is simple, its linearity, and ability of anti-disturbance are good, and it could be integrated easily. Experiment results show that the measurement range of the accelerometer is ±15��g�� and the capacitance resolution can reach 10-16F.
Keywords�� MEMS(micro electro mechanical system) capacitive accelerometers   capacitance detection   weak signal detection   phase-locked-loop amplify     
Received 2008-03-19;
Fund:

������������������Ŀ(D2120060013); ������Ȼ��ѧ����������Ŀ(60736025)

About author: �� ��(1983-), ��,���������,˶ʿ��,songxing2003@gmail.com.
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�� ��, ������, ʢ ε.����ʽ΢���ٶȼƱջ�����·[J]  �������պ����ѧѧ��, 2009,V35(3): 384-388
Song Xing, Fang Jiancheng, Sheng Wei.Circuit for close-loop capacitive micro-accelerometers[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2009,V35(3): 384-388
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http://bhxb.buaa.edu.cn//CN/     ��     http://bhxb.buaa.edu.cn//CN/Y2009/V35/I3/384
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