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�������պ����ѧѧ�� 2008, Vol. 34 Issue (04) :412-416    DOI:
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�����̷������׹�CVD���ʯ
��Ӿ��1, ����2, ����һ3*
1. �������պ����ѧ ��е���̼��Զ���ѧԺ, ���� 100083;
2. �������պ����ѧ ���Ͽ�ѧ�빤��ѧԺ, ���� 100083;
3. �������պ����ѧ ��е���̼��Զ���ѧԺ, ���� 100083
High speed polishing CVD diamonds with hot metal plate
Ma Yongtao1, Sun Yujing2, Chen Wuyi3*
1. School of Mechanical Engineering and Automation, Beijing University of Aeronautics and Astronautics, Beijing 100083, China;
2. School of Materials Science and Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China;

3. School of Mechanical Engineering and Automation, Beijing University of Aeronautics and Astronautics, Beijing 100083, China

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ժҪ ���ø����������׹��豸�Ի�ѧ�������(CVD,Chemical Vapor Deposition)���ʯ�����׹�,�ֱ�����¶ȡ�ת�١�ѹ���Լ��׹�ʱ���ʵ��.���ù�ѧ��ƽ���׹�ǰ����ʯ���ضԱ�,���ù�����΢����ԭ������΢�����׹���������о�.�������:�ϸߵ��׹��ٶȶ���߱��������Լ��׹�Ч�ʾ��Ƚ�����.���׹��¶�850����,�ٶȪ�164��mm/s��,ѹ��24.892��N��������,�׹�120��min��,���ʯ����Ĵֲڶ���ԭ���Ī�R��a=9.67��μm�½�����R��a=0.016��μm.ԭ������΢����ʾ,�׹������������߶���60~70��nm֮���ͻ��,��߶�����ͨ��ߵ�2~3��,�ҷ����״���ֳ�һ���ķ�����.���ֱ���΢�۹������׹�ʱ���õ�ֱѹʽ�˶���ʽ�й�.
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Abstract�� By using high speed polishing equipment based on hot metal plate method(HMPM), experiments were carried out on temperature, speed, load and time to polish CVD(chemical vapor deposition) diamonds. Optical balance was used to compare the diamond weight before and after polishing. Tool microscope and atomic force microscope(AFM) were adopted to research the polished surface. The research shows that high polishing speed is helpful to the surface quality and polishing rate. Under the following conditions: temperature 850����, polishing speed 164��mm/s, load 24.892��N, polishing time 120 minutes, the degree of roughness on the diamond can reach to R a 0.016��μm compared to the original roughness of R a 9.67��μm. Surface topography taken by AFM shows that there are only a small amount of summits which are 60~70��nm in height and the shapes of summits are in special character. The height of high summits is 2 to 3 times than that of ordinary summits. The special topography should be related with the direct pressure polishing method.
Keywords�� chemical vapor deposition   diamonds   polishing   high speed   experiments     
Received 2007-03-29;
About author: ��Ӿ��(1975-),��,����֣����,��ʿ��,myt_ma@126.com.
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��Ӿ��, ����, ����һ.�����̷������׹�CVD���ʯ[J]  �������պ����ѧѧ��, 2008,V34(04): 412-416
Ma Yongtao, Sun Yujing, Chen Wuyi .High speed polishing CVD diamonds with hot metal plate[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2008,V34(04): 412-416
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