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�������պ����ѧѧ�� 2007, Vol. 33 Issue (12) :1412-1416    DOI:
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ʯӢMEMS����Ư�Ƶ����������궨������
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Calibration and compensation periodic error in quartz MEMS gyroscope drift
Zhang Haipeng, Fang Jiancheng, Sheng Wei*
School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China

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ժҪ ʵ�鷢��ʯӢϵ��΢����ϵͳ(MEMS,Micro Electromechanical System)���������Ư���к��к�ǿ�Ĺ��������,��ʱ���Ƶ������Ϊ����.Ϊ����������Ⱥ�ϵͳ����,�о�����������������Ҫ�������ص�,�����������۷����˸�����ϵ��,�����һ�־�ȷ�궨����.ʵ��������������ȷ�궨�Ͳ���,��һ��������������Ⱥ����߳�ʱ�䲹��Ч��.˵���˱���ȷ�궨�����������õIJ���Ч��.
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Abstract�� It was found in experiments that the drift of quartz series MEMS(micro electromechanical system)gyroscopes had good orderliness and periodicity against other series MEMS gyroscopes, especially in short-time and high frequency sampling. In order to improve the precision of the quartz gyroscope and the performance of the system, a precise calibration method was raised by studying each period-s parameters as well as its error transfer coefficients according to error analysis theory. The experiment results not only demonstrate that the precision of the quartz MEMS gyroscopes is improved by the accurately calibrating but also testify that the obtained parameters values are applicable to compensation online in long subsequent time. It is extraordinarily necessary for the quartz series MEMS to process the precise periods calibration.
Keywords�� MEMS gyroscope   periodic error   error calibration   drift   error compensation     
Received 2006-12-08;
Fund:

�����������л���������Ŀ(D2120060013); �����������˲żƻ�������Ŀ(NCET-04-0162)

About author: �ź���(1977��),��,ɽ����̨��,��ʦ,fdrk@163.com.
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�ź���,������,ʢε.ʯӢMEMS����Ư�Ƶ����������궨������[J]  �������պ����ѧѧ��, 2007,V33(12): 1412-1416
Zhang Haipeng, Fang Jiancheng, Sheng Wei.Calibration and compensation periodic error in quartz MEMS gyroscope drift[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2007,V33(12): 1412-1416
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