In the application of small sensor and micro-sensor, especially silicon resonant micro-sensor, the detection of weak signals with low SNR(signal noise ratio), the miniaturization and the anti-jamming problems of the self-oscillation closed-loop system are quite outstanding. Digital PLL (phase locked loops) closed loop measurement system of the compound tuning fork resonant pressure sensor directly transforms input analog signals (pressure) into the semi-digital signals (frequency) with high precision, which has basically solved the problems of the measurement system such as micro structure parameters, high work frequency and weak amplitude, strong coupling and big disturbance of the effective signals etc. The method can be applied to the silicon resonant micro-sensor directly, which is significant and directive for the application of silicon resonant microsensors.
Zhou Haomin, Zhao Qiaozhuan, Tang Zhangyang.Closed loop systems of resonant small sensors and microsensors based on DSP technology[J] JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2006,V32(11): 1312-1315
Christine B, Yves T, Claudine G, et al. Resonant force sensor using a PLL electronic[J].Sensors and Actuators.2003, 104:143-150
���. С��г��ʽ�������ջ�ϵͳ���о� . ����:�������պ����ѧ������ѧ���繤��ѧԺ,2003 Li Haijuan. Research on the closed-loop system of resonant small sensor and micro-sensor .Beijing:School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics,2003(in Chinese)
Gaisser A, Geiger W, Link T, et al. New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes[J].Sensors and Actuators.2002, 97-98:557-562