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�������պ����ѧѧ�� 2006, Vol. 32 Issue (06) :691-694    DOI:
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MOEMS accelerometer based on double Fabry-Perot interferometers and closed loop
Feng Lishuang, Liu Huilan, Lin Heng, Zhang Chunxi*
School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China

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ժҪ �����һ�ֱջ������ʽ˫FPǻ��΢�����(MOEMS)���ٶȼ�,�������乤��ԭ��ϵͳ����.���ù������е�Ԫ����������ٶȵIJ���ת��Ϊ������λ�ƵIJ���,���ù����Ծ۽�͸���Ķ�������������ɵ�FPǻ��������λ��.Ϊ�����ϵͳ�IJ��������Ⱥ������¶ȵȻ������ص�Ӱ��,�����һ�ֲʽ˫FPǻ��������.Ϊ���΢���ٶȼƵ�������ԶȺͶ�̬������Χ,����˲��þ�����ƽ�⼼�����ɱջ����ٶȼ�.����������ѧģ��,������Ƶļ��ٶȼ���Ҫ����ָ��——�����ȡ�����ͷ���ء�����Ƶ�ʵ�һһ��������ϸ����ͷ���.�ڴ˻������������Ʊ���Ҫ���¼��ٶȼƲ������Ż����,�������:��ϵͳ���ȿ��Դﵽ5×10-6��g������.
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Abstract�� A micro-opto-electro-mechanical accelerometer based on differential double Fabry-Perot interferometers(DFPI) and closed loop was designed. The principle and the structure of the accelerometer were introduced. Inertial sensitive module was used to translate carrier’s acceleration measurement to its displacement measurement. The displacement was measured by Fabry-Perot interferometers composedof the mass and the end surface of fiber self-focusing lens. The structure of differential DFPI was designed to improve the sensitivity and restrain the influence of environment factors such as temperature. The closed loop accelerometer using electrostatic servo technology was put forward to improve the output linearity and dynamic range. The mathematic model of the accelerometer was founded, and particular calculation and analysis was made for important parameters, such as sensitivity, carrying capacity of the sensitivity head, natural frequency, etc. The parameters were designed under the requirement of some background. The results show that the system precision can be better than 5×10-6��g��.
Keywords�� micro-opto-electro-mechanical system   accelerometer   Fabry-Perot interferometers   closed loop     
Received 2005-06-27;
About author: ����ˬ(1968-),Ů,�ӱ���������,������, fenglishuang@buaa.edu.cn.
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Feng Lishuang, Liu Huilan, Lin Heng, Zhang Chunxi.MOEMS accelerometer based on double Fabry-Perot interferometers and closed loop[J]  JOURNAL OF BEIJING UNIVERSITY OF AERONAUTICS AND A, 2006,V32(06): 691-694
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