| Citation: | ZHANG X，LU X W，LAI L J. Large-stroke microposition stage driven by reluctance actuator and its trajectory tracking control[J]. Journal of Beijing University of Aeronautics and Astronautics，2024，50（9）：2852-2861 （in Chinese） doi: 10.13700/j.bh.1001-5965.2022.0702
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Maxwell reluctance actuators overcome the problems of small strokes of traditional piezoelectric actuators and low thrust density and efficiency of voice coil motors and have great application potential in large-stroke and high-speed micro/nanoposition. In this paper, a large-stroke two-degree-of-freedom flexible microposition stage driven by a Maxwell reluctance actuator was designed, and its high-performance trajectory tracking control was carried out. The position stage was composed of two Maxwell reluctance actuators with permanent magnet bias and a two-degree-of-freedom decoupled and parallel flexible guiding mechanism. The stage made full use of the nonlinear negative stiffness of the reluctance actuator to partially compensate for the elastic restoring force of the flexible mechanism, which could effectively improve its motion range and energy transfer efficiency and reduce the required thrust of the stage within the range of ± 2 mm from ±120 N to ±24 N. In terms of trajectory tracking control, firstly, in order to compensate for the hysteresis nonlinearity caused by the impulse of soft magnetic material of the actuator, a rate-dependent hysteresis compensator was constructed by using the inverse Prandtl-ishlinskii hysteresis model and placed in the feedforward loop. In addition, in order to solve the low damping resonance and the inconsistency of the dynamic model of the stage, a PI feedback controller with a fractional order phase-lead link was designed to flexibly adjust the open-loop frequency characteristics of the system, realize the high-precision trajectory tracking control of the stage, and effectively reduce the tracking error of the system. The root mean square errors obtained by tracking the trajectory of triangular wave signals with amplitude of 2 mm and frequencies of 1 Hz and 10 Hz are 0.013 mm and 0.017 mm, respectively.
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