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静压气浮直驱转台热特性

张从鹏 刘同 李美波

张从鹏, 刘同, 李美波等 . 静压气浮直驱转台热特性[J]. 北京航空航天大学学报, 2014, 40(7): 893-898. doi: 10.13700/j.bh.1001-5965.2013.0771
引用本文: 张从鹏, 刘同, 李美波等 . 静压气浮直驱转台热特性[J]. 北京航空航天大学学报, 2014, 40(7): 893-898. doi: 10.13700/j.bh.1001-5965.2013.0771
Zhang Congpeng, Liu Tong, Li Meiboet al. Thermal characteristic of aerostatic direct-driven rotary stage[J]. Journal of Beijing University of Aeronautics and Astronautics, 2014, 40(7): 893-898. doi: 10.13700/j.bh.1001-5965.2013.0771(in Chinese)
Citation: Zhang Congpeng, Liu Tong, Li Meiboet al. Thermal characteristic of aerostatic direct-driven rotary stage[J]. Journal of Beijing University of Aeronautics and Astronautics, 2014, 40(7): 893-898. doi: 10.13700/j.bh.1001-5965.2013.0771(in Chinese)

静压气浮直驱转台热特性

doi: 10.13700/j.bh.1001-5965.2013.0771
基金项目: 

北京市人才强教计划资助项目(PHR201108053);北京市教委科技计划资助项目(KM200910009005)

详细信息
    作者简介:

    张从鹏(1975-),男,河南鲁山人,副教授,soaringroc@ncut.edu.cn.

  • 中图分类号: TH133.35

Thermal characteristic of aerostatic direct-driven rotary stage

  • 摘要: 以开发满足精密工程应用的静压气浮直驱转台为目标,研究静压气浮直驱转台结构的热稳定性.首先,分析了静压气浮直驱转台的发热-传热特性,建立了三维热特性有限元模型,计算了气浮直驱转台的温度场云图;用间接耦合的分析方法,将温度场作加载条件,进行转台热-结构耦合分析;然后,对比研究了两种直驱电机安置结构对转台热稳定性的影响,提出了静压气浮直驱转台的空气强制对流冷却方案;最后,完成了无框力矩电机后置式静压气浮直驱转台的温度场检测实验.实验结果表明,静压气浮直驱转台测试点的计算与实测温度的最大误差为1.93 ℃,稳态温度场分布计算精度较高;温度分布稳态时,气浮转台止推轴承气膜单侧间隙的变化量为0.55 μm,在空气轴承气膜设计允许的波动范围内,对轴承性能不产生明显的影响.电机后置式直驱静压气浮转台结构的热稳定性好,适合工业应用.

     

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出版历程
  • 收稿日期:  2014-01-14
  • 刊出日期:  2014-07-20

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