Volume 36 Issue 3
Mar.  2010
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Lu Zhen, Chen Xuedong, He Guangpinget al. Micro-material-test mechanism oriented precision technique[J]. Journal of Beijing University of Aeronautics and Astronautics, 2010, 36(3): 328-332. (in Chinese)
Citation: Lu Zhen, Chen Xuedong, He Guangpinget al. Micro-material-test mechanism oriented precision technique[J]. Journal of Beijing University of Aeronautics and Astronautics, 2010, 36(3): 328-332. (in Chinese)

Micro-material-test mechanism oriented precision technique

  • Received Date: 02 Mar 2009
  • Publish Date: 31 Mar 2010
  • Micro electromechanical systems(MEMS) have vast vistas of application in the aeronautics, astronautics, automobile, bioengineering, environmental management, military, etc. However, the material tests are the bottleneck of the property test for MEMS. That is concerned with subtle motion, precision location, and the measurement of tiny load/displacement. Traditional mechanical manufacture is helpless for the mission duo to friction, clearance, crawl, and error-accumulation of multi-transmission. For this reason, a new type of the redundantly actuated compliant parallel mechanism with piezoelectric actuators was proposed. Based on the inverse kinematics of the redundantly actuated compliant parallel mechanism, and by means of optimum topology, kinematical analysis, and dynamical optimization, the key dimensions of the mechanism were determined. The experiment demonstrates the mechanism is capable in the subtle motion, precision location, and the measurement of tiny load/displacement for the MEMS material test.

     

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