Friction modeling and compensation of positioning stage driven by linear motors
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摘要: 介绍了一种由双边直线电机驱动的H型精密定位平台,为了减小运动平台的速度跟随误差和定位误差,研究了该精密定位系统的摩擦建模和补偿问题.由于工作台的滑块在导轨的不同位置表现出不同的摩擦特性,为改善补偿效果,提出了一种基于经典Stribeck摩擦力模型和工作台运动副位置参数的摩擦建模新方法,通过实验和回归的方法辨识出了工作台双边导轨的改进型Stribeck摩擦模型.基于建立的摩擦模型,采用前馈技术进行摩擦力补偿控制.实验结果表明,基于模型的摩擦补偿提高了系统的控制性能;改进型Stribeck摩擦模型比传统Stribeck摩擦模型有更好的补偿效果,适合具有大行程工作台的摩擦建模与补偿.Abstract: An H-type precise positioning table driven by dual linear motors was introduced. To decrease the velocity following error and positional error of the table, friction modeling and compensation of this precise positional system were studied. As the guide ways of the motion table have different friction characteristics at different positions, an improved friction modeling method was proposed, based on the classical Stribeck friction model and slide plate position to get better compensation effect. The improved Stribeck friction models of the guide ways were identified through experiments and parameters regression analysis. Based on the improved friction identification model, friction was compensated by feed forward technique. Friction compensation experiments results show that the friction compensation based on friction model enhances the control performance of the table and the improved friction model has better compensation effect than traditional Stribeck friction model. The improved friction model is suitable for friction compensation of the positional table with long travel distance.
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Key words:
- linear motor /
- friction modeling /
- friction compensation /
- motion table
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