Manufacturing error analysis of compliant planar 3-DOF micro robot

[1] 毕树生. 面向生物工程的微操作机器人系统研究 . 北京:北京航空航天大学机械工程及自动化学院,2002 Bi Shusheng. Research on micromanipulator system for bioengineering . Beijing:School of Mechanical Engineering & Automation, Beijing University of Aeronautics and Astronautics, 2002(in Chinese) [2] 于靖军. 全柔性机器人机构分析及设计方法研究 . 北京:北京航空航天大学机械工程及自动化学院,2002 Yu Jingjun. Methodology for analysis and design of fully compliant robotic mechanisms . Beijing:School of Mechanical Engineering & Automation, Beijing University of Aeronautics and Astronautics, 2002(in Chinese) [3] Ryu Jae W, Gweon D G. Error analysis of a flexure hinge mechanism induced by machining imperfection[J] Journal of Precision Engineering, 1997,21(2/3):83~89 [4] Niaritsiry T F, Fazenda N, Clavel R. Study of the sources of inaccuracy of a 3 DOF flexure hinge-based parallel manipulator . In:IEEE International Conference on Robotics and Automation . New Orleans, 2004.4091~4096 [5] Niaritsiry T F, Fazenda N, Clavel R. Simulation analysis of the sources of inaccuracy of a parallel manipulator . In:IEEE International Conference on Robotics Systems and Signal Processing ,2003.266~271 [6] Yi B J. Chung G B. Design and experiment of a 3DOF parallel micro-mechanism utilizing flexure hinges . In:IEEE International Conference on Robotics and Automation . Washington, 2002.604~612 [7] Zhang W J, Zou J, Watson L G, et al. The constant-Jacobian method for kinematics of a three-DOF planar micro-motion stage[J] Journal of Robotic Systems, 2002,19(2):63~72