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Volume 24 Issue 4
Apr.  1998
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Journal of Beijing University of Aeronautics and Astronautics  > 1998  >  24(4): 475-478.
Kang Jianchu, Yin Baolin, Gao Penget al. Study on CAD/CAE System Architecture Supporting MEMS[J]. Journal of Beijing University of Aeronautics and Astronautics, 1998, 24(4): 475-478. (in Chinese)
Citation: Kang Jianchu, Yin Baolin, Gao Penget al. Study on CAD/CAE System Architecture Supporting MEMS[J]. Journal of Beijing University of Aeronautics and Astronautics, 1998, 24(4): 475-478. (in Chinese)
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Study on CAD/CAE System Architecture Supporting MEMS

  • Beijing University of Aeronautics and Astronautics,Dept. of Computer Science and Engineering

  • Received Date: 15 Jun 1998
  • Publish Date: 30 Apr 1998
    Abstract
  • CAD/CAE technique plays an important role in MEMS(Micro Electro Mechanical Systems) research, while MEMS CAD/CAE shares some common techniques with conventional CAD/CAE systems, it is also different in many ways.The characteristics of CAD/CAE techniques supporting MEMS were introduced firstly, then the system architecture of MEMS CAD/CAE was studied, the structure frame of software supporting tool was presented and the ways for solving the key techniques were expounded. The application of CAD/CAE technique will improve the design quality and shorten the research time of micro electro-mechanical systems. As a result, it will lead to industrialization of MEMS sooner.

     

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  • 1. Koppelman G M. Oyster:a three dimensional structural simulator for microelectromechanical design. Sensor & Actuator, 1989, 20(11):179~185 2. Senturia S D,Johson B P,Kim S,et al. A computer-aided design system for microelectromechanical systems. J of Microelectromechanical Systems, 1992, 1(1):3~13 3. 费 龙,钟先信, 温志渝,等. 微机械传感器计算机辅助设计系统. 仪器仪表学报, 1995, 16(1):223~226 4. 尹宝林. MEMS中的CAD/CAE技术与系统结构. 仪器仪表学报, 1996, 17(1):210~213 5. 杨 岳, 周兆英, 李 勇,等. 硅微结构异向腐蚀技术及其计算机仿真系统研究. 仪器仪表学报, 1995, 16(1):79~83 6. Danel J S,Delapierre G. Anisotropic crystal etching:a simulation program. Sensor & Actuator, 1992, A31:267~274 7. 孙家广,陈玉健,黄汗文. 计算机辅助设计基础. 北京:清华大学出版社,1990
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