Modeling of active vibration isolation module with finite element method

Aiming at the design of the active micro-vibration control platform with large payloads at low frequency, one kind of the active vibration control platform using modularity design was proposed, which showed the characteristics of the strong carrying capacity and high isolation precision. Modularity simplifies the active vibration isolation platform design greatly. Using four modules the active vibration isolation platform can isolate the vibration of six degrees of freedom, by which a device of two tons can be isolated from vibrations. Because the module has the same construction form, the active vibration isolation platform-s characteristic is decided completely by the module-s characteristic. The finite element method was used to building the dynamic model of the active vibration isolation module, which contained the displacement vector for outside excitation and the force vector for actuator-s control force, when the above two vectors were zero, inherent characteristics of the active vibration isolation module were obtained by solving the dynamics model. Then validity of the dynamic model was illustrated by comparison with the results of the modal analysis by ANSYS software.