Volume 35 Issue 3
Mar.  2009
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Song Xing, Fang Jiancheng, Sheng Weiet al. Circuit for close-loop capacitive micro-accelerometers[J]. Journal of Beijing University of Aeronautics and Astronautics, 2009, 35(3): 384-388. (in Chinese)
Citation: Song Xing, Fang Jiancheng, Sheng Weiet al. Circuit for close-loop capacitive micro-accelerometers[J]. Journal of Beijing University of Aeronautics and Astronautics, 2009, 35(3): 384-388. (in Chinese)

Circuit for close-loop capacitive micro-accelerometers

  • Received Date: 19 Mar 2008
  • Publish Date: 31 Mar 2009
  • A circuit to detect the micro-differential capacitance of micro-silicon inertia sensors was designed,which can be successfully applied in the capacitive MEMS(micro electro mechanical system) accelerometer,especially in the sandwich structure MEMS accelerometers with differential capacitance.The good linearity in large measurement range and high capacitance resolution was achieved by restraining common-mode noise, bias voltage and nonlinearity of voltage output using technologies, such as improving symmetry of rectangle wave source, equi-potential shielding action, coherent demodulation and electrostatic re-balance. The circuit is simple, its linearity, and ability of anti-disturbance are good, and it could be integrated easily. Experiment results show that the measurement range of the accelerometer is ±15g and the capacitance resolution can reach 10-16F.

     

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  • [1] Yazdi N, Ayazi F, Najafi K.Micromachined inertial sensors[J].Proceedings of the IEEE, 1998, 86(8):1640-1658 [2] Jean S. Market opportunities for advanced MEMS accelerometers and overview of actual capabilities vs. required specifications[J].Position Location and Navigation Symposium, 2004,1:78-82 [3] Monajemi P, Ayazi F. Design optimization and implementation of a microgravity capacitive HARPSS accelerometer[J].Sensors Journal, 2006, 6(1):39-46 [4] Neil B, George S. Inertial sensor technology trends [J]. Sensors Journal, 2001,1(4): 332-339 [5] 高钟毓.微机械陀螺原理与关键技术[J].仪器仪表学报,1996, 17(S1):40-44 Gao Zhongyu. The operation principle and key technique of micromechanical gyroscope[J].Chinese Journal of Scientific Instrument,1996, 17(S1): 40-44 (in Chinese) [6] Leland R P. Mechanical-thermal noise in MEMS gyroscopes[J]. Sensors Journal, 2005,5(3):493-500 [7] Biswas K, Sen S, Dutta P.MEMS capacitive accelerometers[J]. Sensor Letters, 2007,5(3):471-484 [8] Leuthold H, Rudolf F. An ASIC for high-resolution capacitive micro-accelerometers[J]. Sensors and Actuators, 1990, A21-A23:278-281 [9] Almaida T M, Piedade M S. High performance analog and digital PLL design[J]. Circuits and Systems, 1999,4:394-397 [10] Larry K, Baxter.Capacitive sensors design and applications[M]. New York:Wiley-IEEE Press, 1996
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