Volume 34 Issue 04
Apr.  2008
Turn off MathJax
Article Contents
Ma Yongtao, Sun Yujing, Chen Wuyiet al. High speed polishing CVD diamonds with hot metal plate[J]. Journal of Beijing University of Aeronautics and Astronautics, 2008, 34(04): 412-416. (in Chinese)
Citation: Ma Yongtao, Sun Yujing, Chen Wuyiet al. High speed polishing CVD diamonds with hot metal plate[J]. Journal of Beijing University of Aeronautics and Astronautics, 2008, 34(04): 412-416. (in Chinese)

High speed polishing CVD diamonds with hot metal plate

  • Received Date: 29 Mar 2007
  • Publish Date: 30 Apr 2008
  • By using high speed polishing equipment based on hot metal plate method(HMPM), experiments were carried out on temperature, speed, load and time to polish CVD(chemical vapor deposition) diamonds. Optical balance was used to compare the diamond weight before and after polishing. Tool microscope and atomic force microscope(AFM) were adopted to research the polished surface. The research shows that high polishing speed is helpful to the surface quality and polishing rate. Under the following conditions: temperature 850℃, polishing speed 164mm/s, load 24.892N, polishing time 120 minutes, the degree of roughness on the diamond can reach to R a 0.016μm compared to the original roughness of R a 9.67μm. Surface topography taken by AFM shows that there are only a small amount of summits which are 60~70nm in height and the shapes of summits are in special character. The height of high summits is 2 to 3 times than that of ordinary summits. The special topography should be related with the direct pressure polishing method.

     

  • loading
  • [1] 徐峰, 左敦稳, 王珉, 等. CVD金刚石厚膜的机械抛光及其残余应力的分析[J]. 人工晶体学报,2004, 33(3):436-440 Xu Feng, Zuo Dunwen, Wang Min, et al. Study on mechanical polishing for CVD diamond thick film and its residual stresses[J]. Journal of Synthetic Crystals,2004,33(3):436-440(in Chinese) [2] Yoshikawa M, Okuzumi F. Hot-iron-metal polishing machine for CVD diamond films and characteristics of the polished surfaces[J]. Surface and Coatings Technology,1997,88(1/2/3):197-203 [3] Wang C Y, Zhang F L, Kuang T C, et al. Chemical/mechanical polishing of diamond films assisted by molten mixture of LiNO3 and KNO3[J]. Thin Solid Films,2006,496(2):698-702 [4] Gloor S, Luthy W, Weber H P. UV laser polishing of thick diamond films for IR windows[J]. Applied Surface Science,1999,138(1/2/3/4):135-139 [5] Leech P W, Reeves G K, Holland A S, et al. Ion beam etching of CVD diamond film in Ar, Ar/O2 and Ar/CF4 gas mixtures[J]. Diamond and Related Materials,2002, 11(3/4/5/6):833-836 [6] Ollison C D, Brown W D, Malshe A P, et al. A comparison of mechanical lapping versus chemical-assisted mechanical polishing and planarization of chemical vapor deposited (CVD) diamond[J]. Diamond and Related Materials,1999,8(6):1083-1090 [7] Tsai H Y, Ting C J, Chou C P. Evaluation research of polishing methods for large area diamond films produced by chemical vapor deposition[J]. Diamond and Related Materials,2007,16(2):253-261 [8] Malshe A P, Park B S. A review of techniques for polishing and planarizing chemically vapor-deposited(CVD) diamond films and substrates[J]. Diamond and Related Materials,1999,8:1198-1213 [9] Yoshikawa M. Development and performance of a diamond-film polishing apparatus with hot metals Proceedings of SPIE-The International Society for Optical Engineering. Bellingham,WA:SPIE,1990,1325:210-221 [10] Zaitsev A M, Kosaca G, Richarz B, et al. Thermochemical polishing of CVD diamond films[J]. Diamond and Related Materials,1998,7:1108-1117
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Article Metrics

    Article views(3062) PDF downloads(982) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return