Closed loop systems of resonant small sensors and microsensors based on DSP technology

[1] 樊尚春.传感器技术及应用[M].北京:北京航空航天大学出版社,2004:390-396 Fan Shangchun. Technology & application of sensors[M]. Beijing:Beijing University of Aeronautics and Astronautics Press, 2004:390-396(in Chinese) [2] 李海娟, 周浩敏. 硅谐振式压力微传感器闭环系统[J].北京航空航天大学学报,2005,31(3):331-335 Li Haijuan, Zhou Haomin. Closed-loop system of silicon resonant pressure micro-sensor[J]. Journal of Beijing University of Aeronautics and Astronautics, 2005, 31(3):331-335(in Chinese) [3] Christine B, Yves T, Claudine G, et al. Resonant force sensor using a PLL electronic[J].Sensors and Actuators, 2003, 104:143-150 [4] 李海娟. 微小型谐振式传感器闭环系统的研究 . 北京:北京航空航天大学仪器科学与光电工程学院,2003 Li Haijuan. Research on the closed-loop system of resonant small sensor and micro-sensor .Beijing:School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics,2003(in Chinese) [5] Gaisser A, Geiger W, Link T, et al. New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes[J]. Sensors and Actuators, 2002, 97-98:557-562