Fiber micro-vibration readout sensor based on MOEMS

[1] 杨华勇. 反射式强度型光纤传感器强度调制特性的数学模型与关键技术的研究 长沙:国防科学技术大学机电工程与自动化学院,2002 Yang Huayong. Research on the mathematical model and key technologies of the reflective intensity modulated fiber-optic sensor . Changsha:College of Mechatronics Engineering and Automation, National University of Defense Technology, 2002(in Chinese) [2] Richard L Lopushansky. All-optical shipboard sensing system Proceedings of the 45th International Instrumentation Symposium. :Instrument Society of America, 1999:357-364 [3] Zhu Yiping, Ren Tianling. Novel ferroelectrics-based micro-acoustic devices and their ultrasonic applications IEEE International Electron Devices Meeting, 2004 IEDM. New Jersey:Institute of Electrical and Electronics Engineers Inc, 2004:51-54 [4] 张克勤,赵玉成. 非接触式光纤声发射传感器的设计[J].自动化仪表,1995,20(5):7-8 Zhang Keqin, Zhao Yucheng. The design of contactless optical fiber acoustic transmission transducer[J]. Process Automation Instrumentation, 1995,20(5):7-8(in Chinese) [5] 伊小素,吴先. 光纤麦克风传声技术[J]. 警察技术,2004,6:3-4 Yi Xiaosu,Wu Xian. Fiber optic microphone technology[J]. Police Technology, 2004, 6:3-4(in Chinese) [6] Eric Udd. Fiber optic distributed sensing systems for harsh aerospace environments Proceedings of the 1999 Smart Structures and Materials-industrial and Commercial Application of Smart Structures Technologies. Washington:Society of Photo-Optical Instrumentation Engineers, 1999:136-137