MOEMS accelerometer based on double Fabry-Perot interferometers and closed loop

[1] 王惠文,娄英明,江先进. 光纤加速度传感器研究进展[J]. 光学技术, 1997, (5):15-20 Wang Huiwen, Lou Yingming, Jiang Xianjin. Recent progress in fiber-optic accelerometers research[J]. Optical Technology, 1997, (5):15-20(in Chinese) [2] Guldimann B,Clerc P A,de Rooij N F. Fiber-optic accelerometer with micro-optical shutter modulation and integrated damping IEEE/LEOS International Conference on Optical MEMS. New York:IEEE, 2000:141-142 [3] Llobera A, Plaza J A, Salinas I, et al. Characterization and passivation effects of an optical accelerometer based on antiresonant waveguides[J]. IEEE Photonics Technology Letters, 2004, 16(1):233-235 [4] Geoffrey A C, Philips J N. High-responsivity fiber-optic flexural disk accelerometers [J]. Journal of Lightwave Technology, 2000, 18(9):1233-1243 [5] Davis C M,Eustace J G. Fiber-optic seismometer [J]. Proc of SPIE, 1986, 718:204-211 [6] Gerges A S,Newson T P,Jones J C,et al. High-sensitivity fiber-optic accelerometers [J]. Opt Lett, 1989,14(4):251-253 [7] Il-Bum Kwon, Man-Yong Choi, Hahngue Moon. Strain measurement using fiber optic total reflected extrinsic Fabry-Perot interferometric sensor with a digital signal processing algorithm[J].Sensors and Actuators A, 2004 (112):10-17 [8] 李莉. 双路Fabry-Perot干涉静电伺服硅微加速度计的研究 . 北京:北京航空航天大学仪器科学与光电工程学院, 2005:41-43 Li li. Study of a micro-opto-mechanical electrostatic servo accelerometer based on double fiber Fabry-Perot interferometers . Beijing:School of Instrument Science and Opto-electronics Engineering Beijing University of Aeronautics and Astronautics, 2005:41-43(in Chinese) [9] 单辉祖.材料力学教程[M].北京:国防工业出版社,1997 Shan Huizu, Tutorial of material mechanics [M]. Beijing:National Defence Industry Press, 1997(in Chinese)