| Citation: | SUN Shuangcheng, QI Hong, SUN Jianping, et al. Inverse estimation of geometric parameters of aluminum matrix microscale structure grating[J]. Journal of Beijing University of Aeronautics and Astronautics, 2017, 43(11): 2199-2206. doi: 10.13700/j.bh.1001-5965.2017.0055(in Chinese)
|
Micro structure grating is a widely used electronic component. The geometric parameters of one-dimensional rectangular aluminum matrix grating are inversely estimated using stochastic particle swarm optimization (SPSO) algorithm. The theoretical overview of rigorous coupled wave analysis (RCWA) algorithm and particle swarm optimization algorithm is introduced, and RCWA algorithm is employed to solve the electromagnetic field problem within grating. The objective function is formulated based on the spectral reflectance obtained by the direct problem, and then the SPSO algorithm is used to optimize the objective function. The geometric parameters such as the grating period, ridge width and groove depth are retrieved simultaneously. The effects of population size and searching space on the inverse estimation results are also investigated. The retrieval results show that SPSO algorithm is effective and robust for estimating geometric parameters of grating and the population size is suggested as 30.
| [1] |
梁铨廷.物理光学[M].北京:电子工业出版社, 2009:1-11.
LIANG Q T.Physical optics[M].Beijing:Publishing House of Electronics Industry, 2009:1-11(in Chinese).
|
| [2] |
LEE B J, WANG L P, ZHANG Z M.Coherent thermal emission by excitation of magnetic polaritons between periodic strips and a metallic film[J].Optical Express, 2008, 16(15):11328-11336. doi: 10.1364/OE.16.011328
|
| [3] |
JIAO Y, LIU L H, LIU L J, et al.Radiative properties tailoring of grating by comb-drive microactuator[J].Journal of Quantitative Spectroscopy and Radiative Transfer, 2014, 143:35-45. doi: 10.1016/j.jqsrt.2014.01.010
|
| [4] |
CHEN Y B, ZHANG Z M.Design of tungsten complex gratings for thermophotovoltaic radiators[J].Optics Communications, 2007, 269(2):411-417. doi: 10.1016/j.optcom.2006.08.040
|
| [5] |
QIU J, LIU L H, HSU P F.FDTD analysis of infrared radiative properties of microscale structure aluminum surfaces[J].Journal of Quantitative Spectroscopy and Radiative Transfer, 2010, 111(12-13):1912-1920. doi: 10.1016/j.jqsrt.2010.04.026
|
| [6] |
ZHANG Z M.Nano/microscale heat transfer[M].New York:McGraw-Hill Professional, 2007:1-36.
|
| [7] |
王强, 沈国土, 杨宝成, 等.遗传算法在光栅面形状优化设计中的应用[J].红外与激光工程, 2005, 34(4):410-414. http://kns.cnki.net/KCMS/detail/detail.aspx?filename=hwyj200504008&dbname=CJFD&dbcode=CJFQ
WANG Q, SHEN G T, YANG B C, et al.Application of genetic algorithm in the design optimization of grating profile[J].Infrared and Laser Engineering, 2005, 34(4):410-414(in Chinese). http://kns.cnki.net/KCMS/detail/detail.aspx?filename=hwyj200504008&dbname=CJFD&dbcode=CJFQ
|
| [8] |
董健. 一维微结构光栅辐射特性的反设计方法[D]. 哈尔滨: 哈尔滨工业大学, 2013. http://cdmd.cnki.com.cn/Article/CDMD-10213-1014001130.htm
DONG J.Inverse design method on radiative properties of one dimensional micro/nano scale grating[D].Harbin:Harbin Institute of Technology, 2013(in Chinese). http://cdmd.cnki.com.cn/Article/CDMD-10213-1014001130.htm
|
| [9] |
CHEN J S, LIN P D, CHIU F C, et al.Grating profile optimization for narrow-band or broad-band infrared emitters with differential evolution algorithms[J].Optical Letters, 2012, 37(16):3399-3401. doi: 10.1364/OL.37.003399
|
| [10] |
KENNEDY J, EBERHART R C.Particle swarm optimization[C]//Proceedings of IEEE International Conference on Neural Networks.Piscataway, NJ:IEEE Press, 1995:1942-1948.
|
| [11] |
ZHAO J M, QIU J, LIU L H.Accurate geometry design of magnetic polariton with specified resonance wavelength:A combined LC circuit model and inverse technique[C]//ASME 20165th Micro/Nanoscale Heat and Mass Transfer International Conference.New York:ASME, 2016:V001T05A008.
|
| [12] |
曾建潮, 崔志华.一种保证全局收敛的PSO算法[J].计算机研究与发展, 2004, 41(8):1333-1338. http://d.wanfangdata.com.cn/Periodical/jsjyjyfz200408003
ZENG J C, CUI Z H.A guaranteed global convergence particle swarm optimizer[J].Journal of Computer Research and Development, 2004, 41(8):1333-1338(in Chinese). http://d.wanfangdata.com.cn/Periodical/jsjyjyfz200408003
|
| [13] |
CUI Z H, ZENG J C, CAI X J.A new stochastic particle swarm optimizer[C]//Proceedings of IEEE International Congress on Evolutionary Computation.Piscataway, NJ:IEEE Press, 2004:316-319. http://ieeexplore.ieee.org/xpls/icp.jsp?arnumber=1330873
|
| [14] |
MOHARAM M G, GRANN E B, POMMET D A.Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J].Journal of the Optical Society of America A, 1995, 12(5):1068-1076. doi: 10.1364/JOSAA.12.001068
|
| [15] |
SHI Y H, EBERHART R C.A modified particle swarm optimizer[C]//Proceedings of IEEE International Conference on Evolutionary Computation.Piscataway, NJ:IEEE Press, 1998:69-73.
|
| [16] |
WAKAKI M, KUDO K, SHIBUYA T.Physical properties and data of optical materials[M].Boca Raton:CRC Press, 2007:1-10.
|
| [17] |
ROBINSON J, SINTON S, RAHMAT-SAMⅡ Y.Particle swarm, genetic algorithm, and their hybrids:Optimization of a profiled corrugated horn antenna[C]//IEEE Antennas and Propagation Society International Symposium.Piscataway, NJ:IEEE Press, 2002:314-317. http://ieeexplore.ieee.org/xpls/icp.jsp?arnumber=1016311
|
| [18] |
CHENG Q, LI P P, LU J, et al.Silicon complex grating with different groove depths as an absorber for solar cells[J].Journal of Quantitative Spectroscopy & Radiative Transfer, 2014, 132:70-79. https://www.sciencedirect.com/science/article/pii/S0022407313000496
|
Figures(9) / Tables(4)
Copyright © Journal of Beijing University of Aeronautics and Astronautics
Address: Editorial Department of Journal of Beijing University of Aeronautics and Astronautics, 37 Xueyuan Road, Haidian District, Beijing Post Code: 100191 Email: jbuaa@buaa.edu.cn
Supported by:
Beijing Renhe Information Technology Co., Ltd.
DownLoad:
