| Citation: | ZHOU Rui, ZHOU Hui, GUI Heli, et al. Analysis and optimization of 2-DOF micro-positioning stage based on flexible hinges[J]. Journal of Beijing University of Aeronautics and Astronautics, 2018, 44(9): 1982-1990. doi: 10.13700/j.bh.1001-5965.2017.0706(in Chinese)
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In order to improve the dynamic characteristics of the micro-positioning stage, a decoupled two-degree-of-freedom (2-DOF) parallel flexure-hinge micro-positioning stage is proposed. First, a new type of 2-DOF micro-positioning stage is designed based on the structure characteristics of the corner-filleted flexure hinge and micro-positioning stage. Second, the equivalent stiffness model of the micro-positioning stage is deduced, and the correctness of the theoretical model is verified by comparing the theoretical results with the finite element simulation. And at the same time, the influence of different structural parameters on micro-positioning stage is discussed, and the sensitivity comparison and analysis are conducted. Then, to improve the 2-DOF micro-positioning platform equivalent stiffness as the goal, the optimization model is established, and the adaptive particle swarm optimization algorithm is used to optimize the main structure parameters of the micro-positioning stage. Finally, the natural frequency of the stage is calculated, and its correctness is verified by finite element simulation. The above analysis proves the feasibility and effectiveness of the mechanism.
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