Volume 49 Issue 4
Apr.  2023
Turn off MathJax
Article Contents
WANG Y D,SUN Y F,LEI D Y,et al. Thermal oxidation reliability and structure optimization of thin film thermocouple[J]. Journal of Beijing University of Aeronautics and Astronautics,2023,49(4):943-948 (in Chinese) doi: 10.13700/j.bh.1001-5965.2021.0318
Citation: WANG Y D,SUN Y F,LEI D Y,et al. Thermal oxidation reliability and structure optimization of thin film thermocouple[J]. Journal of Beijing University of Aeronautics and Astronautics,2023,49(4):943-948 (in Chinese) doi: 10.13700/j.bh.1001-5965.2021.0318

Thermal oxidation reliability and structure optimization of thin film thermocouple

doi: 10.13700/j.bh.1001-5965.2021.0318
Funds:  National Key R&D Program of China (2018YFB2003100,2018YFB2003101)
More Information
  • Corresponding author: E-mail:syf@buaa.edu.cn
  • Received Date: 10 Jun 2021
  • Accepted Date: 24 Sep 2021
  • Available Online: 02 Jun 2023
  • Publish Date: 14 Oct 2021
  • The part of an aero engine with the highest temperature is the turbine blade. The film material is prepared on the surface of the object to be measured to form a thermocouple sensor, which can timely and effectively measure the temperature of the turbine blade. The diffusion failure of the thermal oxidation interface between multilayer films of thin film thermocoupleis one of the main reasons for the low reliability of thin film thermocouples. One of the main causes of the low reliability of thin film thermocouples is the diffusion failure of the thermal oxidation interface between multilayer layers. Based on Fick's second law, this paper proposes a diffusion reliability model of multilayer film to quantitatively describe the diffusion failure mechanism of thin film thermocouples. Through simulation calculation and particle swarm optimization, the optimal structure of each layer is obtained with the goal of maximizing the lifetime of thin-film, It provides a certain method reference for improving the lifetime of thin film thermocouple in structure and technology.

     

  • loading
  • [1]
    张建国. 快速响应薄膜温度传感器技术研究[D]. 长沙: 国防科学技术大学, 2008: 1-2.

    ZHANG J G. Technology research of thin film temperature sensor with fast response[D]. Changsha: National University of Defense Technology, 2008: 1-2(in Chinese).
    [2]
    黄春峰, 蒋明夫, 毛茂华. 国外航空发动机薄膜热电偶技术发展研究[J]. 航空发动机, 2011, 37(6): 53-57. doi: 10.3969/j.issn.1672-3147.2011.06.017

    HUANG C F, JIANG M F, MAO M H. Development on thin-film thermocouples technology for foreign aeroengine[J]. Aeroengine, 2011, 37(6): 53-57(in Chinese). doi: 10.3969/j.issn.1672-3147.2011.06.017
    [3]
    汪若兰. 柔性高温薄膜传感器的制备及性能研究[D]. 成都: 电子科技大学, 2020: 1.

    WANG R L. Preparation and properties of flexible high temperature film sensor[D]. Chengdu: University of Electronic Science and Technology of China, 2020: 1(in Chinese).
    [4]
    崔云先. 瞬态切削用NiCr/NiSi薄膜热电偶测温刀具研究[D]. 大连: 大连理工大学, 2011: 40-100.

    CUI Y X. Development of testing temperature cutter with NiCr/NiSi thin film thermocouple for transient cutting[D]. Dalian: Dalian University of Technology, 2011: 40-100 (in Chinese) .
    [5]
    高杨. 高温合金表面金属涂层活性扩散障研究[D]. 沈阳: 东北大学, 2014: 1-53.

    GAO Y. Research on active diffusion barrier of matal coating on superalloy[D]. Shenyang: Northeastern University, 2014: 1-53(in Chinese).
    [6]
    崔云先, 郭立明, 盛晓幸, 等. 薄膜热电偶瞬态温度传感器Al2O3绝缘膜制备工艺及性能表征[J]. 功能材料, 2014, 45(7): 7139-7142. doi: 10.3969/j.issn.1001-9731.2014.07.029

    CUI Y X, GUO L M, SHENG X X, et al. The preparation and characterization of insulative Al2O3 film for the film thermocouple transient temperature sensor[J]. Journal of Functional Materials, 2014, 45(7): 7139-7142(in Chinese). doi: 10.3969/j.issn.1001-9731.2014.07.029
    [7]
    杨柯. In2O3/ITO高温陶瓷薄膜热电偶的制备与性能研究[D]. 成都: 电子科技大学, 2016: 8-17.

    YANG K. Researches on fabrication and properties of In2O3/ITO high-temperature ceramic thin-film thermocouples[D]. Chengdu: University of Electronic Science and Technology of China, 2016: 8-17(in Chinese).
    [8]
    张瑶. 基于MEMS工艺的陶瓷薄膜热电偶研制[D]. 上海: 上海交通大学, 2018: 11-44.

    ZHANG Y. Fabrication of ceramic thin film thermocouple based on MEMS technology[D]. Shanghai: Shanghai Jiao Tong University, 2018: 11-44(in Chinese).
    [9]
    李洪美, 孙云娜, 段力, 等. 高温复合多层膜结构传感器的热机械可靠性[J]. 仪表技术与传感器, 2015: 7-10. doi: 10.3969/j.issn.1002-1841.2015.11.003

    LI H M, SUN Y N, DUAN L, et al. Thermal mechanical reliability of high temperature thermocouple transducer with composite multilayer film structure[J]. Instrument Technique and Sensor, 2015: 7-10(in Chinese). doi: 10.3969/j.issn.1002-1841.2015.11.003
    [10]
    简春菲, 王晓峰, 王司. 基于ALO-SVM的模拟电路故障诊断研究[J]. 自动化技术与应用, 2019, 38(12): 113-118. doi: 10.3969/j.issn.1003-7241.2019.12.028

    JIAN C F, WANG X F, WANG S. Fault diagnosis of analog circuits based on ALO-SVM[J]. Techniques of Automation and Applications, 2019, 38(12): 113-118(in Chinese). doi: 10.3969/j.issn.1003-7241.2019.12.028
    [11]
    王伟, 张宏刚, 丁黎黎, 等. 考虑车辆限速区间的危险品运输网络优化[J]. 运筹与管理, 2021, 30(4): 128-134.

    WANG W, ZHANG H G, DING L L, et al. Transportation network optimization of the hazardous materials considering vehicle speed limit interval[J]. Operations Research and Management Science, 2021, 30(4): 128-134(in Chinese).
    [12]
    赵鑫, 郑文禹, 侯智华, 等. 基于粒子群优化算法的多能互补系统经济调度研究[J]. 华电技术, 2021, 43(4): 14-20.

    ZHAO X, ZHENG W Y, HOU Z H, et al. Research on economic dispatch of multi-energy complementary system based on particle swarm optimization[J]. Huadian Technology, 2021, 43(4): 14-20(in Chinese).
    [13]
    LU N S, SUO Z G, VLASSAK J J. The effect of film thickness on the failure strain of polymer-supported metal films[J]. Acta Materialia, 2010, 58(5): 1679-1687. doi: 10.1016/j.actamat.2009.11.010
    [14]
    HAMASHA M M, ALZOUBI K, SWITZER J C III, et al. A study on crack propagation and electrical resistance change of sputtered aluminum thin film on poly ethylene terephthalate substrate under stretching[J]. Thin Solid Films, 2011, 519(22): 7918-7924. doi: 10.1016/j.tsf.2011.06.062
    [15]
    MOHANTY B C, CHOI H R, CHOI Y M, et al. Thickness-dependent fracture behaviour of flexible ZnO :  Al thin films[J]. Journal of Physics D:Applied Physics, 2011, 44(2): 025401. doi: 10.1088/0022-3727/44/2/025401
    [16]
    PENG C, JIA Z, BIANCULLI D, et al. In situ electro-mechanical experiments and mechanics modeling of tensile cracking in indium tin oxide thin films on polyimide substrates[J]. Journal of Applied Physics, 2011, 109(10): 103530. doi: 10.1063/1.3592341
    [17]
    王洪敏. 高温薄膜热电偶的制备及性能研究[D]. 成都: 电子科技大学, 2018: 49-56.

    WANG H M. Preparation and properties of high temperature thin film thermocouples[D]. Chengdu: University of Electronic Science and Technology of China, 2018: 49-56 (in Chinese) .
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Figures(4)  / Tables(1)

    Article Metrics

    Article views(283) PDF downloads(30) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return