| Citation: | ZHANG S F，XUAN W P，SHI L H，et al. Solidly mounted resonator based on optimized Bragg structure[J]. Journal of Beijing University of Aeronautics and Astronautics，2024，50（2）：449-455 （in Chinese） doi: 10.13700/j.bh.1001-5965.2022.0436
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The effective coupling coefficient and the quality factor of the bulk acoustic wave resonators determine the overall performance of bulk acoustic wave filters. The effective coupling coefficient is dependent on the layer stack structure, especially the piezoelectric material, while the quality factor is highly dependent on the loss mechanism, including the electrical and acoustical loss. For solidly mounted resonator (SMR), the acoustic losses mainly include the acoustic leakage to the substrate. In this work, to enhance the quality factor of the SMR, the structure of the Bragg layer is optimized to reduce the acoustic energy leakage to the substrate. Through optimizing the Bragg stack, the longitudinal and shear waves can be confined in the piezoelectric stack simultaneously, and the quality factor at the anti-resonance frequency is highly improved. Moreover, to suppress the spurious mode of the resonator, the thickness of the top layer of the Bragg is optimized to change the device dispersion characteristic from type II to type I. Experimental results show that the performance of the SMR is improved greatly based on the optimized Bragg structure.
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