• 论文 •

### 影响激光外差高精度计量的 几个关键因素

1. 北京航空航天大学 自动化科学与电气工程学院
• 收稿日期:2000-09-06 发布日期:2010-09-26
• 作者简介:赵慧洁(1966-),女,辽宁沈阳人,副教授,100083,北京.
• 基金资助:

航空科学基金资助项目(96I51115); 国家部委基金资助项目

### Factors Affecting the Precision of Heterodyne Interferometer

ZHAO Hui-jie, ZHANG Guang-jun

1. Beijing University of Aeronautics and Astronautics, School of Automation Science and Electronic Engineering
• Received:2000-09-06 Published:2010-09-26

Abstract: Non-linear errors resulted from mis-installation of common-path heterodyne interferometer affect the precision of its measurement system. Four factors which can lead to such non-linear errors were identified,they are the frequency mixing, the phase jump of different metals to be measured, the tilt of the measured surface and NA of the aperture. Based on heterodyne and vector analysis theories, origins and modes of the frequency mixing error and phase jump error were analyzed. On the above basis, procedures to improve the accuracy of the measurement system were suggested. It was demonstrated that the precision of the laser heterodyne measurement system can be improved to nanometer orders.