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硅谐振式压力微传感器闭环系统

李海娟 周浩敏

李海娟, 周浩敏. 硅谐振式压力微传感器闭环系统[J]. 北京航空航天大学学报, 2005, 31(03): 331-335.
引用本文: 李海娟, 周浩敏. 硅谐振式压力微传感器闭环系统[J]. 北京航空航天大学学报, 2005, 31(03): 331-335.
Li Haijuan, Zhou Haomin. Closed-loop system of silicon resonant pressure micro-sensor[J]. Journal of Beijing University of Aeronautics and Astronautics, 2005, 31(03): 331-335. (in Chinese)
Citation: Li Haijuan, Zhou Haomin. Closed-loop system of silicon resonant pressure micro-sensor[J]. Journal of Beijing University of Aeronautics and Astronautics, 2005, 31(03): 331-335. (in Chinese)

硅谐振式压力微传感器闭环系统

基金项目: 航天科学基金资助项目(03B51049)
详细信息
    作者简介:

    李海娟(1979-),女,广东韶关人,硕士生, luckxiami@263.net.

  • 中图分类号: TP 221

Closed-loop system of silicon resonant pressure micro-sensor

  • 摘要: 硅谐振压力微传感器在自激振荡回路中采取电阻热激励、电阻拾振时得到的信号,由于有用信号本身的量级小,因而含有严重的同频干扰信号(耦合激励信号),信噪比SNR (Signal Noise Ratio)仅为10-3数量级.为了提高信噪比,滤除同频干扰,多级放大之后的处理中将锁相环PLL(Phase-Locked Loop)工作原理和分频技术相结合,由锁相环输出作为传感器的激励和鉴相相关信号,搭建硅谐振压力微传感器闭环自激振荡回路.结果表明:采用锁相分频技术的微传感器闭环系统能可靠运行,信噪比低的问题得到了很好解决.

     

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出版历程
  • 收稿日期:  2003-08-27
  • 网络出版日期:  2005-03-31

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