Study on CAD/CAE System Architecture Supporting MEMS
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摘要: CAD/CAE技术在MEMS(Micro Electro Mechanical Systems)研究过程中具有非常重要的作用.本文首先介绍了用于MEMS的CAD/CAE技术特点,然后研究了MEMS CAD/CAE系统结构,给出了软件支持工具结构框图,指明了解决其中关键技术的途径.CAD/CAE技术的应用,将提高微型机电系统的设计质量,缩短研制周期,使之及早走向工业化.Abstract: CAD/CAE technique plays an important role in MEMS(Micro Electro Mechanical Systems) research, while MEMS CAD/CAE shares some common techniques with conventional CAD/CAE systems, it is also different in many ways.The characteristics of CAD/CAE techniques supporting MEMS were introduced firstly, then the system architecture of MEMS CAD/CAE was studied, the structure frame of software supporting tool was presented and the ways for solving the key techniques were expounded. The application of CAD/CAE technique will improve the design quality and shorten the research time of micro electro-mechanical systems. As a result, it will lead to industrialization of MEMS sooner.
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Key words:
- CAD /
- system architecture /
- softwave tools /
- MEMS(Micro Electro Mechanical Systems) /
- CAE
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