Motion of Microwave Plasma Electrons in the Action of Magnetic Field
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摘要: 对矩形微波谐振腔中的等离子体,在高频电磁场和非均匀稳恒外磁场作用下的电子回旋共振运动进行了讨论.对电子写出了牛顿运动方程,采用数值计算方法,用计算机计算并绘出了电子运动曲线和运动轨迹.对电子的能量也作了计算.从计算结果分析了电子运动的特点和电子的能量吸收.Abstract: In rectangular microwave resonator, under the action of high frequency electro-magnetic field and inhomogeneous static magnetic field, the electron cyclotron resonance motion of the plasma electrons have been studied. Writing out the Newton equations of motion of the electrons and by using the numerical method, the trajectory and the behavier of the motion of the electrons were computed and drawn out by computer. The energy of the electrons were also computed. Form the computed results,the characteristics of the motion and the energy absorbed by the electrons were analyzed.
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Key words:
- plasma /
- cyclotron resonance /
- energy absorption /
- curve of election motion
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1. Toyama H, Okabayashi M, Ishizuka H. Plasma acceleration using a high frequency field and a static magnetic field.Plasma Phys, 1968,10:319~336 2. 宋汝安,程先安,周忠毅.磁场-微波等离子体与大面积金刚石薄膜.物理学报,1990,39:1635~1639 3. Matsuo S, Adachi Y. Reactiv ion beam etching using a broad beam ECR ion source. Jpn J Appl Phys,1981,21:L4~L6 4. Matsuo S, Kiuchi M. Low temperature chemical vapor deposition method utilizing an electron cyclotron resonance plasma. Jpn J Appl Phys, 1983,22:L210~L212 -
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