Improved temperature error model of silicon MEMS gyroscope with inside frame driving
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摘要: 温度误差是MEMS(Micro Electronic Mechanical System)陀螺仪的主要误差源之一,为了消除温度对内框架驱动式硅MEMS陀螺仪性能的影响,提出了一种改进的温度误差模型.基于硅材料的赛贝克(Seebeek)效应,结合表头温度变形,分析了陀螺仪零偏误差;利用温度引起的干扰力矩,分析了陀螺仪输出与比力及角加速度有关项误差;针对温度引起系统谐振频率的变化,分析了陀螺仪标度因数误差.试验结果表明:在温度变化过程中,比力引起的干扰力矩是导致陀螺仪温度误差的主要因素,验证了改进的温度误差模型的正确性,补偿后陀螺仪的零偏稳定性提高了53.75倍,标度因数精度提高了19.6倍,改进的温度误差模型也适用于其它MEMS陀螺仪.Abstract: Temperature error is one of the main errors for MEMS(micro electronic mechanical system)gyroscopes. For eliminating temperature error of silicon MEMS gyroscope with inside frame driving, the improved temperature error model of gyroscope was presented. Based on the Seebeek theory of silicon material and the distortion depending on temperature of microstructure, the bias error was analyzed. The interferential moment depending on temperature was employed to analyze the error which relates with force and angular acceleration. According to the inherent frequency change depending on temperature, the error of scale factor was analyzed. The experimental results show that the interferential moment which relates with force is primary factor resulting in bias error of gyroscope during temperature change and verified the accuracy of the theories model. The bias stability and scale factor precision of gyroscope compensated by improved temperature error model were improved 53.75 and 19.6 times respectively. The improved temperature error model is applicable to other silicon MEMS gyroscopes.
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[1] Jia Ruigao,Wang Jinsong,Feng Guanping.Temperature coefficient of sensitivity dependence of the measurement error quartz crystal resonators International Frequency Control Symposium. :IEEE, 1996:493-500 [2] Dauderstadt U A, Sarro P M, Middelhoek S.Temperature dependence and drift of a thermal accelerometer International Conference on Solid Sensors and Actuators. Chicago:IEEE, 1997:1209-1212 [3] Victor E D,Vladimir M P.The determined chaos in disturbed by temperature dynamic systems with gyros[J].IEEE,2003:638-643 [4] 李万玉,阮爱武,罗晋生,等.微机械梳状驱动音叉陀螺仪的误差源研究[J].航空学报, 1999, 20(5):426-429 Li Wanyu,Yuan Aiwu, Luo Jinsheng,et al.Error sources in micromachined comb-drive tuning-fork gyroscope[J].Acta Aeronautica et Astronautica Sinica, 1999, 20(5):426-429(in Chinese) [5] Ashwin A S. Integrated micromecchehanical resonant sensor for inertial measurement system . Berkeley :School of Electrical Engineering and Computer Science,University of California,2002 [6] Wyatt O D. Mechanical analysis and design of vibratory micromachined gyroscopes . Berkeley :School of Mechanical Engineering,University of California,2001 [7] Jason K P H. Modeling and indentification of the jet propulsion laboratory vibratory rate microgyroscope . Los Angeles:School of Mechanical Engineering, University of California,2002 [8] 王寿荣.硅微惯性器件理论及应用[M].南京:东南大学出版社,2000:56-61 Wang Shourong.The theories and application of silicon inertial microsensor[M].Nanjing:Southeast University Press,2000:56-61(in chinese) [9] Itzhack Y B,Richard R H.Implicit and explicit spacecraft gyro calibration AIAA Guidance,Navigation,and Control Conference and Exhibit. Providence:AIAA,2004:1-17 [10] 徐丽娜,邓正隆,张广莹.陀螺仪温度试验与建模研究[J].宇航学报,1999, 20(2):99-103 Xu Lina, Deng Zhenglong,Zhang Guangying. Temperatue test and modeling research of gyroscope[J].Journal of Astronautics, 1999, 20(2):99-103(in Chinese) -
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