双谐振器敏感结构谐振式传感器

樊尚春; 蔡晨光; 王莹莹; 邢维巍

双谐振器敏感结构谐振式传感器

北京航空航天大学仪器科学与光电工程学院, 北京 100083

基金项目: 国家自然科学基金资助项目(50275009); 航空科学基金资助项目(02I51018)

详细信息

作者简介:
樊尚春(1962-),男,内蒙古包头人,教授,shangcfan@buaa.edu.cn.

中图分类号: TH 814⁺.6
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- 被引次数: 0
出版历程
- 收稿日期: 2006-04-30
- 网络出版日期: 2006-11-30

Resonant sensor with double resonators

School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China

摘要

摘要: 提出一种采用双谐振器敏感结构的谐振式传感器,传感器的敏感元件包括两个结构参数一致的谐振器,传感器的闭环控制系统由两个幅度控制器和一个反相器组成.分析了这样两个谐振器串联的频率特性,指出在谐振器固有频率点上,两个谐振器串联的相移是180°.给出了双谐振器敏感结构谐振式传感器闭环系统的实现方法,同时分析了当两个谐振器的结构参数不一致时,两个谐振器串联的频率特性.分析结果表明,两个结构参数相差不大的谐振器串联仍然可以构成自激闭环.双谐振器敏感结构谐振式传感器的闭环控制系统中去掉了移相环节,避免了由移相环节产生的相位漂移所引入的测量误差,并有效地提高了传感器的Q值.
- 谐振器 /
- 闭环控制系统 /
- 相移 /
- Q值 /
- 传感器
Abstract: A new resonant sensor consisting of two resonators of uniform structure and size is presented. The closed loop control system is composed of two amplitude controllers and an inverter. The frequency characteristics of the two resonators in series are analyzed. It is found that the phase shift of the two resonators in series is 180° at the resonator′s nature frequency. Based on the frequency characteristics, the closed loop system of a resonant sensor with double resonators is designed. When the structure and size of the two resonators is not uniform, the frequency characteristics of the two resonators in series are also analyzed. When there is a little difference between the two resonators in series, they can also be used in a resonant sensor. In the closed loop control system, the phase shifter need not be used. The measurement error brought by the phase drift is avoided, and the Q factor of the resonant sensor is effectively increased.
- resonators /
- closed loop control systems /
- phase shifters /
- Q factor /
- sensors

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参考文献(1)

[1] 刘广玉,樊尚春,陈明,等.新型传感器技术及应用[M].北京:北京航空航天大学出版社,1995:100-128 Liu Guangyu, Fan Shangchun, Chen Ming, et al. New sensor technology and application[M]. Beijing:Beijing University of Aeronautics and Astronautics Press, 1995:100-128(in Chinese) [2] Elwenspoek M, Wiegerink R. Mechanical microsensors[M].Berlin:Springer, 2001:245-257 [3] Esashi M. Resonant sensors by silicon micromachining Proceedings of the Annual IEEE International Frequency Control Symposium.USA:IEEE, 1996:609-614 [4] Welham C J, Gardner J W, Greenwood J. A laterally driven micromachined resonant pressure sensor [J]. Sensors and Actuators A, 1996, 52:86-91 [5] Greenwood J C, Satchell D W. Miniature silicon resonant pressure sensor [J]. IEE Proceedings, Part D:Control Theory and Applications, 1988,135(5):369-372 [6] Henry M P, Clarke D W, Archer N, et al. A self-validating digital Coriolis mass-flow meter:an overview[J]. Control Engineering, 2000,8(5):487-506 [7] Welham C J, Greenwood J, Bertioli M M. A high accuracy resonant pressure sensor by fusion bonding and trench etching [J]. Sensors and Actuators, 1999, 76:298-304 [8] Aikele M, Bauer K, Ficker W, et al. Resonant accelerometer with self-test [J]. Sensors and Actuators A, 2001, 92:161-167

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