Fiber micro-vibration readout sensor based on MOEMS
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摘要: 针对采用半导体工艺加工的微机械结构对振动进行测量的问题,提出了基微光机电系统(MOEMS)结构并采用光纤读出的振动传感器的设计方案,分析了该传感器的基本测量原理并推导了数学模型.该传感器采用单光纤的读出方式,利用固定于探测器敏感头前端的微结构感受待测物体的振动,通过测量由微结构振动引起的反射光强度的变化,实现对振动的测量.单光纤结构的使用和微结构参数的合理设计,使得该系统与传统的光纤读出系统相比,具有灵敏度高、尺寸小、易于同光纤匹配的特点.应用该系统对压电陶瓷的振动情况进行测量,可探测到0.18nm的位移.
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关键词:
- 微光机电系统(MOEMS) /
- 微振动传感器 /
- 反射光强
Abstract: To measure the vibration of micro-structure, a scheme of sensor basedon micro-optic-electro-mechanical system(MOEMS) with fiber-optic readout was proposed,and its mathematical model was deduced. The single-fiber readout structure and a micro-structure fixed in the front of the sensor were used. The micro-structure vibrated as the measured object moved, and its vibration caused the change of light intensity. The sensor detected vibration displacement by receiving the light intensity. As a result of the single-fiber structure and the parameters optimization of micro-structure, compared with other fiber readout structures, this system has the advantages of high sensitivity and miniaturization which is easier to match with fiber system. The response behaviors of the system to the piezoelectric ceramics excitation were studied through the experiments. And it could detect the vibration displacement of 0.18nm. -
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