Fiber micro-vibration readout sensor based on MOEMS
-
摘要: 针对采用半导体工艺加工的微机械结构对振动进行测量的问题,提出了基微光机电系统(MOEMS)结构并采用光纤读出的振动传感器的设计方案,分析了该传感器的基本测量原理并推导了数学模型.该传感器采用单光纤的读出方式,利用固定于探测器敏感头前端的微结构感受待测物体的振动,通过测量由微结构振动引起的反射光强度的变化,实现对振动的测量.单光纤结构的使用和微结构参数的合理设计,使得该系统与传统的光纤读出系统相比,具有灵敏度高、尺寸小、易于同光纤匹配的特点.应用该系统对压电陶瓷的振动情况进行测量,可探测到0.18nm的位移.
-
关键词:
- 微光机电系统(MOEMS) /
- 微振动传感器 /
- 反射光强
Abstract: To measure the vibration of micro-structure, a scheme of sensor basedon micro-optic-electro-mechanical system(MOEMS) with fiber-optic readout was proposed,and its mathematical model was deduced. The single-fiber readout structure and a micro-structure fixed in the front of the sensor were used. The micro-structure vibrated as the measured object moved, and its vibration caused the change of light intensity. The sensor detected vibration displacement by receiving the light intensity. As a result of the single-fiber structure and the parameters optimization of micro-structure, compared with other fiber readout structures, this system has the advantages of high sensitivity and miniaturization which is easier to match with fiber system. The response behaviors of the system to the piezoelectric ceramics excitation were studied through the experiments. And it could detect the vibration displacement of 0.18nm. -
[1] 杨华勇. 反射式强度型光纤传感器强度调制特性的数学模型与关键技术的研究 长沙:国防科学技术大学机电工程与自动化学院,2002 Yang Huayong. Research on the mathematical model and key technologies of the reflective intensity modulated fiber-optic sensor . Changsha:College of Mechatronics Engineering and Automation, National University of Defense Technology, 2002(in Chinese) [2] Richard L Lopushansky. All-optical shipboard sensing system Proceedings of the 45th International Instrumentation Symposium. :Instrument Society of America, 1999:357-364 [3] Zhu Yiping, Ren Tianling. Novel ferroelectrics-based micro-acoustic devices and their ultrasonic applications IEEE International Electron Devices Meeting, 2004 IEDM. New Jersey:Institute of Electrical and Electronics Engineers Inc, 2004:51-54 [4] 张克勤,赵玉成. 非接触式光纤声发射传感器的设计[J].自动化仪表,1995,20(5):7-8 Zhang Keqin, Zhao Yucheng. The design of contactless optical fiber acoustic transmission transducer[J]. Process Automation Instrumentation, 1995,20(5):7-8(in Chinese) [5] 伊小素,吴先. 光纤麦克风传声技术[J]. 警察技术,2004,6:3-4 Yi Xiaosu,Wu Xian. Fiber optic microphone technology[J]. Police Technology, 2004, 6:3-4(in Chinese) [6] Eric Udd. Fiber optic distributed sensing systems for harsh aerospace environments Proceedings of the 1999 Smart Structures and Materials-industrial and Commercial Application of Smart Structures Technologies. Washington:Society of Photo-Optical Instrumentation Engineers, 1999:136-137 -
点击查看大图
计量
- 文章访问数: 2774
- HTML全文浏览量: 126
- PDF下载量: 778
- 被引次数: 0
下载:
