Temperature compensation of pressure sensor based on the interpolation of splines
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摘要: 提出了基于三次样条曲线插值的温度补偿方法,用这种方法对测压范围为0.013 3×105~3.198 9×105 Pa,温度应用范围为-55~+80℃的高精度谐振筒压力传感器的实验标定结果进行了温度补偿.为加快标定过程,给出了传感器标定点数的减少方案.结果表明,在传感器的标定点数减少2/3的情况下,提出的温度补偿方法的综合误差为0.007 9%,约是基于径向基函数(RBF)神经网络的温度补偿方法的1/2,从而有效减少了传感器的标定成本和工作量.这对于解决高精度压力传感器的温度补偿问题具有一定的理论意义和工程应用价值.Abstract: The temperature compensation method based on the interpolation of cubic splines was presented. This method was applied for the temperature compensation of the experimental results of calibration of high precision resonant cylinder pressure sensors. The measuring range of the pressure sensor is 0.013 3×105~3.198 9×105 Pa and the applied temperature range is -55~+80℃. To make the calibrating process of pressure sensor fast, the principle of reducing the number of calibrating points was presented. The results indicate that the integrated error of the presented method of temperature compensation is 0.007 9%, when the number of calibrating points reduces about 2/3. The integrated error is approximately half of the method of temperature compensation based on the radial basis function(RBF)neural network. Thereby the presented method reduces the cost and workload of calibration effectually. The proposed method can provide a valuable theoretical reference for the temperature compensation of the high precision pressure sensors.
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Key words:
- sensors /
- splines /
- temperature /
- compensation /
- neural network
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