MOEMS accelerometer based on double Fabry-Perot interferometers and closed loop
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摘要: 设计了一种闭环反馈差动式双FP腔的微光机电(MOEMS)加速度计,介绍了其工作原理及系统构成.利用惯性敏感单元将对载体加速度的测量转变为对载体位移的测量,利用光纤自聚焦透镜的端面与质量块组成的FP腔测量载体位移.为了提高系统的测量灵敏度和抑制温度等环境因素的影响,设计了一种差动式双FP腔测量机构.为提高微加速度计的输出线性度和动态测量范围,提出了采用静电力平衡技术构成闭环加速度计.建立了其数学模型,对所设计的加速度计重要参数指标——灵敏度、敏感头受载、固有频率等一一进行了详细计算和分析.在此基础上完成了设计背景要求下加速度计参数的优化设计,结果表明:该系统精度可以达到5×10-6g以上.Abstract: A micro-opto-electro-mechanical accelerometer based on differential double Fabry-Perot interferometers(DFPI) and closed loop was designed. The principle and the structure of the accelerometer were introduced. Inertial sensitive module was used to translate carrier’s acceleration measurement to its displacement measurement. The displacement was measured by Fabry-Perot interferometers composedof the mass and the end surface of fiber self-focusing lens. The structure of differential DFPI was designed to improve the sensitivity and restrain the influence of environment factors such as temperature. The closed loop accelerometer using electrostatic servo technology was put forward to improve the output linearity and dynamic range. The mathematic model of the accelerometer was founded, and particular calculation and analysis was made for important parameters, such as sensitivity, carrying capacity of the sensitivity head, natural frequency, etc. The parameters were designed under the requirement of some background. The results show that the system precision can be better than 5×10-6g.
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[1] 王惠文,娄英明,江先进. 光纤加速度传感器研究进展[J]. 光学技术, 1997, (5):15-20 Wang Huiwen, Lou Yingming, Jiang Xianjin. Recent progress in fiber-optic accelerometers research[J]. Optical Technology, 1997, (5):15-20(in Chinese) [2] Guldimann B,Clerc P A,de Rooij N F. Fiber-optic accelerometer with micro-optical shutter modulation and integrated damping IEEE/LEOS International Conference on Optical MEMS. New York:IEEE, 2000:141-142 [3] Llobera A, Plaza J A, Salinas I, et al. Characterization and passivation effects of an optical accelerometer based on antiresonant waveguides[J]. IEEE Photonics Technology Letters, 2004, 16(1):233-235 [4] Geoffrey A C, Philips J N. High-responsivity fiber-optic flexural disk accelerometers [J]. Journal of Lightwave Technology, 2000, 18(9):1233-1243 [5] Davis C M,Eustace J G. Fiber-optic seismometer [J]. Proc of SPIE, 1986, 718:204-211 [6] Gerges A S,Newson T P,Jones J C,et al. High-sensitivity fiber-optic accelerometers [J]. Opt Lett, 1989,14(4):251-253 [7] Il-Bum Kwon, Man-Yong Choi, Hahngue Moon. Strain measurement using fiber optic total reflected extrinsic Fabry-Perot interferometric sensor with a digital signal processing algorithm[J].Sensors and Actuators A, 2004 (112):10-17 [8] 李莉. 双路Fabry-Perot干涉静电伺服硅微加速度计的研究 . 北京:北京航空航天大学仪器科学与光电工程学院, 2005:41-43 Li li. Study of a micro-opto-mechanical electrostatic servo accelerometer based on double fiber Fabry-Perot interferometers . Beijing:School of Instrument Science and Opto-electronics Engineering Beijing University of Aeronautics and Astronautics, 2005:41-43(in Chinese) [9] 单辉祖.材料力学教程[M].北京:国防工业出版社,1997 Shan Huizu, Tutorial of material mechanics [M]. Beijing:National Defence Industry Press, 1997(in Chinese) -
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