回转误差测试中系统噪声分离技术

冯明; 周程瑜; 张坤; 王新杰

doi:10.13700/j.bh.1001-5965.2019.0316

回转误差测试中系统噪声分离技术

doi: 10.13700/j.bh.1001-5965.2019.0316

北京科技大学机械工程学院, 北京 100083

基金项目:

工业强基工程 TC160A310

详细信息

作者简介:
冯明男，博士，教授，博士生导师。主要研究方向：动静压轴承技术、超精密电主轴设计与测试技术、高速同步电机及其控制技术等

通讯作者:
冯明. E-mail:mingfeng@me.ustb.edu.cn

中图分类号: TH161.5
计量
- 文章访问数: 963
- HTML全文浏览量: 161
- PDF下载量: 348
- 被引次数: 0
出版历程
- 收稿日期: 2019-06-18
- 录用日期: 2019-10-28
- 网络出版日期: 2020-04-20

Separation technology of system noise in error motion test

School of Mechanical Engineering, University of Science and Technology Beijing, Beijing 100083, China

Funds:

Industrial Strong Foundation Engineering TC160A310

More Information

Corresponding author: FENG Ming, . E-mail:mingfeng@me.ustb.edu.cn

摘要

摘要:
高精度主轴的回转误差和测试系统的噪声常处于同一水平，这极大地影响了用频域三点法测量主轴回转误差的准确性。针对同步误差（SEM），提出了对含噪声信号进行等角度采样重构、集合平均和小波滤波的组合降噪处理方法，提出了根据传感器和被测主轴直径定量确定小波分解层数的方法，经仿真实验证明其具有良好的去噪效果。针对异步误差（ASEM），提出了消除测试系统噪声的方法，研究了圈数对异步误差测试结果的影响规律。此外，搭建了测试系统，验证了所提方法的有效性。
- 回转误差 /
- 三点法 /
- 误差分离 /
- 集合平均 /
- 小波去噪
Abstract:
Since the error motion of the high-precision spindles is often in the same order as the noise of the test system, the measuring accuracy of the three-point method is greatly reduced by the noise signals. With the synchronous error motion (SEM), a combined processing algorithm with equal angle sampling and reconstruction, ensemble average filtering and wavelet filtering for noise-containing signal is proposed. A method for quantitatively determining the wavelet decomposition layer based on the diameters of both sensor and measured spindle is proposed. The simulation results show that the new combined method has good denoising effect. With the asynchronous error motion (ASEM), a method for eliminating the noise of the test system is proposed, and the influence of the number of test cycles on ASEM is studied. In addition, a test system was built and the effectiveness of the proposed methods was experimentally verified.
- error motion /
- three-point method /
- error separation /
- ensemble average /
- wavelet denoising

HTML全文

图 1 三点法原理示意图

Figure 1. Schematic diagram of principle of three-point method

下载: 全尺寸图片幻灯片

图 2 仿真信号分离结果

Figure 2. Simulated signal separation results

下载: 全尺寸图片幻灯片

图 3 仿真信号分离偏差

Figure 3. Simulated signal separation deviation

下载: 全尺寸图片幻灯片

图 4 转速传感器波形

Figure 4. Waveform of speed sensor

下载: 全尺寸图片幻灯片

图 5 集合平均处理后含噪声仿真信号分离偏差

Figure 5. Noise-containing simulated signal separation deviation after collective average processing

下载: 全尺寸图片幻灯片

图 6 小波阈值去噪处理后含噪声仿真信号分离偏差

Figure 6. Noise-containing simulated signal separation deviation after wavelet threshold denoising

下载: 全尺寸图片幻灯片

图 7 双重滤波处理后含噪声仿真信号分离偏差

Figure 7. Noise-containing simulated signal separation deviation after double filtering

下载: 全尺寸图片幻灯片

图 8 含噪声仿真信号不同处理方式最大分离偏差对比

Figure 8. Maximum seperation deviation comparison of different processing methods for noise-containing simulated signal

下载: 全尺寸图片幻灯片

图 9 测试系统组成

Figure 9. Composition of test system

下载: 全尺寸图片幻灯片

图 10 测试装置

Figure 10. Test device

下载: 全尺寸图片幻灯片

图 11 转速1×10⁴r/min下误差分离结果对比

Figure 11. Comparison of error separation results at rotational speed of 1×10⁴r/min

下载: 全尺寸图片幻灯片

图 12 计算圈数对异步误差评价值的影响

Figure 12. Influence of counting cycles on ASEM evaluation value

下载: 全尺寸图片幻灯片

表 1 仿真信号成分

Table 1. Simulated signal components

信号类型	周期成分
圆度误差	r(t)=1.3cos(ωt)-0.8sin(ωt)+0.16cos(2ωt)+ 0.12sin(2ωt)+0.05cos(3ωt)- 0.07sin(3ωt)+0.05cos(4ωt)-0.1sin(4ωt)
回转误差	v(t)=0.01cos(ωt)+0.05sin(ωt)- 0.06cos(2ωt)+0.02sin(2ωt)- 0.14cos(3ωt)+0.1sin(3ωt)+0.08cos(4ωt)

下载: 导出CSV

表 2 CDS主要性能参数

Table 2. Main performance parameters of CDS

参数	数值
量程/μm	250
分辨率	3×10^-5
带宽/kHz	15
线性度/%	< 0.2
探芯直径/mm	2

下载: 导出CSV

表 3 不同转速下回转误差分离结果

Table 3. Results of separation of error motion at different rotational speeds

转速/(10⁴ r·min^-1)	圆度误差/ μm	偏心误差/ μm	同步误差/ μm	异步误差/ μm
1	0.707	1.937	0.087	0.230
2	0.707	2.045	0.106	0.856
3	0.704	2.263	0.184	0.891
4	0.704	2.701	0.189	1.544
注：表中异步误差按照6σ进行评价。

下载: 导出CSV

表 4 转速1×10⁴r/min下噪声对误差分离结果的影响

Table 4. Effect of noise on error separation results at rotational speed of 1×10⁴r/min

是否去噪	圆度误差/ μm	偏心误差/ μm	同步误差/ μm	异步误差/ μm
是	0.707	1.937	0.087	0.230
否	0.865	1.938	0.166	0.546

下载: 导出CSV

参考文献(17)

[1]	ANANDAN K P, OZDOGANLAR O B.A multi-orientation error separation technique for spindle metrology of miniature ultra-high-speed spindles[J].Precision Engineering, 2016, 43:119-131.
[2]	伍良生, 杨勇, 周大帅.机床主轴径向回转误差的测试与研究[J].机械设计与制造, 2009(1):107-109. WU L S, YANG Y, ZHOU D S.Dynamic measurement technology of the spindle motion error of high speed spindle[J].Machinery Design & Manufacture, 2009(1):107-109(in Chinese).
[3]	李自军, 洪迈生, 魏元雷, 等.精确的频域三点法直线误差分离技术[J].机械设计与研究, 2002, 18(3):54-55. LI Z J, HONG M S, WEI Y L, et al.Accurate frequency domain three-point method for straightness error separation[J].Machine Design and Research, 2002, 18(3):54-55(in Chinese).
[4]	FUJIMAKI K, SASE H, MITSUI K.Effects of sensor noise in digital signal processing of the three-point method[J].Measurement Science and Technology, 2008, 19(1):15201.
[5]	李济顺, 洪迈生.提高圆度误差分离精度的措施[J].计量学报, 1999, 20(2):92-95. LI J S, HONG M S.Approaches to improve the accuracy of roundness error separation[J].Acta Metrologica Sinica, 1999, 20(2):92-95(in Chinese).
[6]	苏恒, 洪迈生, 魏元雷, 等.机床主轴径向误差运动在线检测与信号处理[J].机械工程学报, 2002, 38(6):56-60. SU H, HONG M S, WEI Y L, et al.CNC machine spindle radial motion error on-line test and signal processing[J].Chinese Journal of Mechanical Engineering, 2002, 38(6):56-60(in Chinese).
[7]	王世良.超精密车床主轴回转误差测试系统的研究[D].哈尔滨: 哈尔滨工业大学, 2016: 10-14. WANG S L.Research on measurement system of ultra precision in the spindle rotation error[D].Harbin: Harbin Institute of Technology, 2016: 10-14(in Chinese).
[8]	AOKI Y, OZONO S.On a new method of roundness measurement based on the three-point method[J].Journal of Japan Society of Precision Engineering, 1966, 32(12):27-32.
[9]	韩正桐, 洪迈生, 李自军.三点法圆度误差分离及演化形式与精度分析[J].上海交通大学学报, 2002, 36(9):1225-1227. HAN Z T, HONG M S, LI Z J.Three-point method and its variation for roundness error separation and accuracy analysis[J].Journal of Shanghai Jiaotong University, 2002, 36(9):1225-1227(in Chinese).
[10]	雷贤卿, 李言, 周彦伟, 等.3点法圆度误差分离技术的新算法[J].兵工学报, 2007, 28(1):73-77. LEI X Q, LI Y, ZHOU Y W, et al.A new matrix algorithm of three-point method roundness error separation technique[J].Acta Armamentarii, 2007, 28(1):73-77(in Chinese).
[11]	曹青松, 俞爱兰.高精度转速测量新方法的研究[J].机床与液压, 2010, 38(17):38-40. CAO Q S, YU A L.A new method for high precision speed measurement[J].Machine Tool & Hydraulics, 2010, 38(17):38-40(in Chinese).
[12]	陈钊, 杨现萍, 冯巧宁.等角度重采样在航空发动机振动分析中的应用[J].机械研究与应用, 2015, 28(1):71-73. CHEN Z, YANG X P, FENG Q N.Application of equal angle resampling method in aircraft engine vibration analysis[J].Mechanical Research & Application, 2015, 28(1):71-73(in Chinese).
[13]	张怀, 王广君, 曾旭明, 等.基于FPGA的消噪同步叠加平均算法仿真分析及实现[J].测控技术, 2013, 32(12):13-16. ZHANG H, WANG G J, ZENG X M, et al.Simulation analysis and realization of the synchronization overlapping average algorithm for denoising based on FPGA[J].Measurement & Control Technology, 2013, 32(12):13-16(in Chinese).
[14]	徐志钮.介损在线监测去噪方法的有效性[J].高电压技术, 2015, 41(3):909-917. XU Z N.Validity of noise reduction method in dielectric loss on-line monitoring[J].High Voltage Engineering, 2015, 41(3):909-917(in Chinese).
[15]	王微.基于小波分析和统计理论的核磁共振信号消噪方法研究[D].长春: 长春大学, 2013: 24-30. WANG W.Research of the methods about MRS signal denosing based on wavelet analysis and statistical theory[D].Changchun: Jilin University, 2013: 24-30(in Chinese).
[16]	郑钧, 侯锐锋.小波去噪中小波基的选择[J].沈阳大学学报, 2009, 21(2):108-110. ZHENG J, HOU R F.Selection of wavelet base in denoising of wavelet transform[J].Journal of Shenyang University, 2009, 21(2):108-110(in Chinese).
[17]	朱艳芹, 杨先麟.几种基于小波阈值去噪的改进方法[J].电子测试, 2008(2):18-22. ZHU Y Q, YANG X L.Several new methods based on wavelet thresholding denoising[J].Electronic Test, 2008(2):18-22(in Chinese).