基于CCR带并行腔双集束型设备调度方法

周炳海; 黎明

doi:10.13700/j.bh.1001-5965.2015.0538

基于CCR带并行腔双集束型设备调度方法

doi: 10.13700/j.bh.1001-5965.2015.0538

周炳海^,,
黎明

同济大学机械与能源工程学院, 上海 201804

基金项目: 国家自然科学基金（71471135，61273035）

详细信息

作者简介:
周炳海男,博士,教授,博士生导师。主要研究方向:制造系统调度、建模与仿真评价,设备可靠性与预防性维护建模。Tel: 021-54810409 E-mail:bhzhou@tongji.edu.cn;黎明男,硕士研究生。主要研究方向:半导体制造系统生产调度、建模与仿真评价。

通讯作者:
周炳海,Tel.: 021-54810409 E-mail: bhzhou@tongji.edu.cn

中图分类号: F270;TP391
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- 文章访问数: 822
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- 被引次数: 0
出版历程
- 收稿日期: 2015-08-24
- 网络出版日期: 2016-07-20

Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource

ZHOU Binghai^,,
LI Ming

School of Mechanical Engineering, Tongji University, Shanghai 201804, China

摘要

摘要: 为有效解决450mm晶圆制造中带有并行处理腔的集束型设备群调度问题，提出了基于产能约束资源（CCR）的调度方法。首先，综合考虑多品种加工、晶圆驻留和资源约束等特征，以系统总完工时间最小作为目标，建立带并行腔双集束型设备调度数学模型；其次，为优化机械手作业顺序，对CCR实施锁定-收紧-松弛（LTL）策略，构建了一种以CCR为界的分段调度算法；最后，进行了仿真实验分析。结果表明本文提出的算法是有效和有竞争性的。
- 集束型设备群 /
- 并行腔 /
- 驻留约束 /
- 产能约束资源 /
- 调度算法
Abstract: To effectively solve scheduling problems of multiple cluster tools of 450 mm wafer fabrication systems with parallel processing chambers, a scheduling method based on capacity constraint resource (CCR) was proposed. Firstly, with comprehensive consideration of the characteristics of different types of wafers, resources and residency constraints, a mathematical programming model of double-cluster tools with parallel chambers was established to minimize the makespan of the system. Then, to optimize manipulator movements by adopting locking-tightening-loosening (LTL) strategy to the CCR, a piecewise scheduling algorithm was constructed with the CCR．Finally, through the analysis of simulation experiments, the results indicate that the proposed algorithm is valid and competitive.
- multiple cluster tools /
- parallel chambers /
- residency constraint /
- capacity constraint resource /
- scheduling algorithm

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参考文献(15)

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