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基于柔性铰链的二自由度微动平台分析及优化

周睿 周辉 桂和利 董虎 曹毅

周睿, 周辉, 桂和利, 等 . 基于柔性铰链的二自由度微动平台分析及优化[J]. 北京航空航天大学学报, 2018, 44(9): 1982-1990. doi: 10.13700/j.bh.1001-5965.2017.0706
引用本文: 周睿, 周辉, 桂和利, 等 . 基于柔性铰链的二自由度微动平台分析及优化[J]. 北京航空航天大学学报, 2018, 44(9): 1982-1990. doi: 10.13700/j.bh.1001-5965.2017.0706
ZHOU Rui, ZHOU Hui, GUI Heli, et al. Analysis and optimization of 2-DOF micro-positioning stage based on flexible hinges[J]. Journal of Beijing University of Aeronautics and Astronautics, 2018, 44(9): 1982-1990. doi: 10.13700/j.bh.1001-5965.2017.0706(in Chinese)
Citation: ZHOU Rui, ZHOU Hui, GUI Heli, et al. Analysis and optimization of 2-DOF micro-positioning stage based on flexible hinges[J]. Journal of Beijing University of Aeronautics and Astronautics, 2018, 44(9): 1982-1990. doi: 10.13700/j.bh.1001-5965.2017.0706(in Chinese)

基于柔性铰链的二自由度微动平台分析及优化

doi: 10.13700/j.bh.1001-5965.2017.0706
基金项目: 

国家自然科学基金 50905075

江苏省“六大人才高峰”计划 ZBZZ-012

江苏省普通高校专业学位研究生实践创新计划 SJZZ16-0212

详细信息
    作者简介:

    周睿  女, 硕士研究生。主要研究方向:柔性铰链及其应用

    曹毅  男, 博士, 教授, 硕士生导师。主要研究方向:机器人机构学及机器人技术

    通讯作者:

    曹毅.E-mail:caoyi@jiangnan.edu.cn

  • 中图分类号: V414.5;TH122

Analysis and optimization of 2-DOF micro-positioning stage based on flexible hinges

Funds: 

National Natural Science Foundation of China 50905075

the Six Talent Peaks Project in Jiangsu Province ZBZZ-012

the Research and the Innovation Project for College Graduates of Jiangsu Province SJZZ16-0212

More Information
  • 摘要:

    为改进微动平台的动态特性,提出了一种解耦的基于柔性铰链的二自由度微动平台。首先,综合考虑倒圆角直梁型柔性铰链与微动平台的结构特点,设计了一种新型的二自由度微动平台; 其次,推导了该微动平台的等效刚度计算模型,并通过理论计算与有限元仿真分析对比,验证了理论模型的正确性; 同时探讨了各结构参数对微动平台等效刚度的影响,并进行了灵敏度对比和分析; 再次,以提高二自由度微动平台的等效刚度为目标,建立了其优化设计模型,并采用自适应粒子群优化算法对该微动平台的主要结构参数进行了优化。最后,理论计算了该微动平台的固有频率,并通过有限元仿真分析验证了其正确性。上述分析证明了该机构的可行性及有效性。

     

  • 图 1  二自由度微动平台

    Figure 1.  2-DOF micro-positioning stage

    图 2  倒圆角直梁型柔性铰链

    Figure 2.  Corner-filleted flexure hinge

    图 3  倒圆角直梁型柔性铰链的受力分析

    Figure 3.  Force analysis of corner-filleted flexure hinge

    图 4  二自由度微动平台结构平面

    Figure 4.  Structure plan of 2-DOF micro-positioning stage

    图 5  复合平行四杆机构

    Figure 5.  Compound parallel four-bar mechanism

    图 6  微动平台仿真模型

    Figure 6.  Simulation model of micro-positioning stage

    图 7  x轴方向力-形变关系

    Figure 7.  Relationship between x-axis force and displacement

    图 8  结构参数与等效刚度k的关系

    Figure 8.  Relationship between structural parameters and equivalent stiffness k

    图 9  自适应粒子群优化算法适应度曲线

    Figure 9.  Fitness curve of adaptive particle swarm optimization algorithm

    图 10  微动平台的各阶振型

    Figure 10.  Various modes of vibration of micro-positioning stage

    表  1  二自由度微动平台结构参数

    Table  1.   Structural parameters of 2-DOF micro-positioning stage

    mm
    参数 b s1 m r t h
    数值 85 3.3 3.3 4 2 20
    下载: 导出CSV

    表  2  x轴方向位移仿真值、理论值及其相对误差

    Table  2.   x-axis displacement simulation value, theoretical value and its relative error

    力/N x轴方向位移
    理论值/(10-7m) 仿真值/(10-7m) 相对误差/%
    2 1.048 8 1.065 3 1.57
    4 2.097 5 2.132 5 1.67
    6 3.146 3 3.197 0 1.61
    8 4.195 1 4.260 7 1.56
    10 5.243 8 5.320 2 1.46
    12 6.286 4 6.376 3 1.43
    14 7.342 3 7.443 6 1.38
    16 8.396 5 8.509 0 1.34
    18 9.390 2 9.511 3 1.29
    20 10.534 5 10.667 2 1.26
    下载: 导出CSV

    表  3  优化前后二自由度微动平台等效刚度对比

    Table  3.   Comparison of equivalent stiffness of 2-DOF micro-positioning stage before and after optimization

    等效刚度/(N·m-1) 优化率/%
    优化前 优化后
    1.907×107 2.116×107 10.96
    下载: 导出CSV

    表  4  二自由度微动平台前5阶固有频率仿真值

    Table  4.   The first five natural frequency simulation values of 2-DOF micro-positioning stage

    阶数 固有频率仿真值/Hz
    1阶 116.04
    2阶 160.94
    3阶 232.65
    4阶 284.39
    5阶 358.20
    下载: 导出CSV
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出版历程
  • 收稿日期:  2017-11-13
  • 录用日期:  2018-01-19
  • 刊出日期:  2018-09-20

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