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摘要:
高精度主轴的回转误差和测试系统的噪声常处于同一水平，这极大地影响了用频域三点法测量主轴回转误差的准确性。针对同步误差（SEM），提出了对含噪声信号进行等角度采样重构、集合平均和小波滤波的组合降噪处理方法，提出了根据传感器和被测主轴直径定量确定小波分解层数的方法，经仿真实验证明其具有良好的去噪效果。针对异步误差（ASEM），提出了消除测试系统噪声的方法，研究了圈数对异步误差测试结果的影响规律。此外，搭建了测试系统，验证了所提方法的有效性。
Abstract:Since the error motion of the high-precision spindles is often in the same order as the noise of the test system, the measuring accuracy of the three-point method is greatly reduced by the noise signals. With the synchronous error motion (SEM), a combined processing algorithm with equal angle sampling and reconstruction, ensemble average filtering and wavelet filtering for noise-containing signal is proposed. A method for quantitatively determining the wavelet decomposition layer based on the diameters of both sensor and measured spindle is proposed. The simulation results show that the new combined method has good denoising effect. With the asynchronous error motion (ASEM), a method for eliminating the noise of the test system is proposed, and the influence of the number of test cycles on ASEM is studied. In addition, a test system was built and the effectiveness of the proposed methods was experimentally verified.
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Key words:
- error motion /
- three-point method /
- error separation /
- ensemble average /
- wavelet denoising
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图 5 集合平均处理后含噪声仿真信号分离偏差
Figure 5. Noise-containing simulated signal separation deviation after collective average processing
图 6 小波阈值去噪处理后含噪声仿真信号分离偏差
Figure 6. Noise-containing simulated signal separation deviation after wavelet threshold denoising
图 7 双重滤波处理后含噪声仿真信号分离偏差
Figure 7. Noise-containing simulated signal separation deviation after double filtering
图 8 含噪声仿真信号不同处理方式最大分离偏差对比
Figure 8. Maximum seperation deviation comparison of different processing methods for noise-containing simulated signal
图 11 转速1×104r/min下误差分离结果对比
Figure 11. Comparison of error separation results at rotational speed of 1×104r/min
表 1 仿真信号成分
Table 1. Simulated signal components
信号类型 周期成分 圆度误差 r(t)=1.3cos(ωt)-0.8sin(ωt)+0.16cos(2ωt)+
0.12sin(2ωt)+0.05cos(3ωt)-
0.07sin(3ωt)+0.05cos(4ωt)-0.1sin(4ωt)回转误差 v(t)=0.01cos(ωt)+0.05sin(ωt)-
0.06cos(2ωt)+0.02sin(2ωt)-
0.14cos(3ωt)+0.1sin(3ωt)+0.08cos(4ωt)
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表 2 CDS主要性能参数
Table 2. Main performance parameters of CDS
参数 数值 量程/μm 250 分辨率 3×10-5 带宽/kHz 15 线性度/% < 0.2 探芯直径/mm 2
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表 3 不同转速下回转误差分离结果
Table 3. Results of separation of error motion at different rotational speeds
转速/(104
r·min-1)圆度误差/
μm偏心误差/
μm同步误差/
μm异步误差/
μm1 0.707 1.937 0.087 0.230 2 0.707 2.045 0.106 0.856 3 0.704 2.263 0.184 0.891 4 0.704 2.701 0.189 1.544 注：表中异步误差按照6σ进行评价。
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表 4 转速1×104r/min下噪声对误差分离结果的影响
Table 4. Effect of noise on error separation results at rotational speed of 1×104r/min
是否
去噪圆度误差/
μm偏心误差/
μm同步误差/
μm异步误差/
μm是 0.707 1.937 0.087 0.230 否 0.865 1.938 0.166 0.546
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