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薄膜热电偶热氧化可靠性及结构优化

王一丹 孙宇锋 雷东阳 薛雨晴

王一丹,孙宇锋,雷东阳,等. 薄膜热电偶热氧化可靠性及结构优化[J]. 北京航空航天大学学报,2023,49(4):943-948 doi: 10.13700/j.bh.1001-5965.2021.0318
引用本文: 王一丹,孙宇锋,雷东阳,等. 薄膜热电偶热氧化可靠性及结构优化[J]. 北京航空航天大学学报,2023,49(4):943-948 doi: 10.13700/j.bh.1001-5965.2021.0318
WANG Y D,SUN Y F,LEI D Y,et al. Thermal oxidation reliability and structure optimization of thin film thermocouple[J]. Journal of Beijing University of Aeronautics and Astronautics,2023,49(4):943-948 (in Chinese) doi: 10.13700/j.bh.1001-5965.2021.0318
Citation: WANG Y D,SUN Y F,LEI D Y,et al. Thermal oxidation reliability and structure optimization of thin film thermocouple[J]. Journal of Beijing University of Aeronautics and Astronautics,2023,49(4):943-948 (in Chinese) doi: 10.13700/j.bh.1001-5965.2021.0318

薄膜热电偶热氧化可靠性及结构优化

doi: 10.13700/j.bh.1001-5965.2021.0318
基金项目: 国家重点研发计划(2018YFB2003100,2018YFB2003101)
详细信息
    通讯作者:

    E-mail:syf@buaa.edu.cn

  • 中图分类号: V23;TB114.3

Thermal oxidation reliability and structure optimization of thin film thermocouple

Funds: National Key R&D Program of China (2018YFB2003100,2018YFB2003101)
More Information
  • 摘要:

    航空发动机涡轮叶片处于发动机温度最高的部位,将薄膜材料制备于待测物表面形成热电偶传感器,可及时有效的对涡轮叶片进行测温。薄膜热电偶多层膜间的热氧化界面扩散失效是导致薄膜可靠性不高的主要原因之一,基于Fick第二定律提出多层膜扩散可靠性模型,定量描述薄膜热电偶扩散失效机理,通过仿真计算,结合粒子群算法,以薄膜寿命最大为目标,寻优得到各膜层对应的最佳结构,为结构工艺上提高薄膜热电偶寿命的研究提供了一定的借鉴。

     

  • 图 1  Ta2O5与SiO2的扩散界面

    Figure 1.  Diffusion interface between Ta2O5 and SiO2

    图 2  保护层被扩散示意图

    Figure 2.  Diagram of protective layer being diffused

    图 3  保护层被扩散情况的仿真结果

    Figure 3.  Simulation results of diffusion of protective layer

    图 4  各层寿命对比

    Figure 4.  Life span comparison chart of each layer

    表  1  各膜层结构优化结果

    Table  1.   Optimization results of each film structure

    物质名称初始膜厚D/m±30%变化寻优结果/m
    Al2O31×10−77×10−8
    SiC5×10−73.5×10−7
    ZrB25×10−73.5×10−7
    Al2O31×10−77×10−8
    Ta2O52×10−62.6×10−6
    ITO5.5×10−77.15×10−7
    In2O35.5×10−77.15×10−7
    Ta2O52×10−62.6×10−6
    SiO23×10−63.9×10−6
    下载: 导出CSV
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  • 被引次数: 0
出版历程
  • 收稿日期:  2021-06-10
  • 录用日期:  2021-09-24
  • 网络出版日期:  2021-10-14
  • 整期出版日期:  2023-04-30

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