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Volume 42 Issue 7
Jul.  2016
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Journal of Beijing University of Aeronautics and Astronautics  > 2016  >  42(7): 1361-1367.
ZHOU Binghai, LI Ming. Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource[J]. Journal of Beijing University of Aeronautics and Astronautics, 2016, 42(7): 1361-1367. doi: 10.13700/j.bh.1001-5965.2015.0538(in Chinese)
Citation: ZHOU Binghai, LI Ming. Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource[J]. Journal of Beijing University of Aeronautics and Astronautics, 2016, 42(7): 1361-1367. doi: 10.13700/j.bh.1001-5965.2015.0538(in Chinese)
shu

Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource

doi: 10.13700/j.bh.1001-5965.2015.0538

  • School of Mechanical Engineering, Tongji University, Shanghai 201804, China

  • Received Date: 24 Aug 2015
  • Publish Date: 20 Jul 2016
    Abstract
  • To effectively solve scheduling problems of multiple cluster tools of 450 mm wafer fabrication systems with parallel processing chambers, a scheduling method based on capacity constraint resource (CCR) was proposed. Firstly, with comprehensive consideration of the characteristics of different types of wafers, resources and residency constraints, a mathematical programming model of double-cluster tools with parallel chambers was established to minimize the makespan of the system. Then, to optimize manipulator movements by adopting locking-tightening-loosening (LTL) strategy to the CCR, a piecewise scheduling algorithm was constructed with the CCR．Finally, through the analysis of simulation experiments, the results indicate that the proposed algorithm is valid and competitive.

     

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