Principle and application of horizontal suspension isolator constituted by trilinear pendulum
-
摘要: 针对一种三线摆水平隔振器,首先在某一特定方向上建立了以摆动角θ为广义坐标的拉格朗日方程.在某一摆动角下,将立体图形投影到一个平面上,通过几何关系的求解,将方程中所有变量转化为广义坐标θ的函数,得到了机构水平摆动固有频率的表达式.然后根据表达式分析了机构结构参数对机构水平摆动固有频率的影响.利用MATLAB得到一些仿真结果,通过分析得知增大负载支撑高度可以降低机构固有频率,但同时会增加机构的高度.而在保证机构稳定的前提下,根据整体设备的高度要求,通过增大固定盘与摆动盘直径比、减小固定盘与摆动盘距离和支撑高度之比,可以达到降低固有频率而不过分增加机构高度的目的.Abstract: For the suspension isolator constituted by trilinear pendulum, the Lagrangian equation with swing angle as generalized coordinate was established firstly at a particular direction. When the swing angle was a particular value, the three-dimensional graphic was projected onto a plane, other variables were converted to the functions of swinging angle by solving geometric relations, thus the horizontal natural frequency can be obtained. The impact to horizontal natural frequency from mechanism structure parameters were analyzed through adjusting the parameters in a certain range. A lot of simulation results were made by MATLAB. The results show that increasing supporting length can reduce the natural frequency, but increase mechanism height. It also shows that once mechanism stability is insured, increasing the ratio of fixed disk’s diameter to swing disk’s diameter and reducing the ratio of fixed disk and swing disk-s distance to supporting length can reduce the natural frequency, and not increase the height of the mechanism very much.
-
Key words:
- horizontal vibration /
- trilinear pendulum /
- dynamics
-
[1] Keown Mc.From micro to nano-machining-towards the nanometer era[J].Sensor Review,1996,16:4-10 [2] Rivin E I.Vibration isolation of precision equipment[J].Precision Engineering,1995,56:17-41 [3] Kim J J,Amick H.Active vibration control in fabs[J].Semiconductor International,1997,7:1-6 [4] Subrahmanyan P K.A model approach to precision motion control .USA:Dept.of Mechanical Engineering, MIT,1999 [5] Ibrahim R A.Recent advances in nonlinear passive vibration isolators[J].Journal of Sound and Vibration,2008,314:371 452 [6] Matthew J W.Horizontal vibration isolation system:US3784146 .1974-01-08 [7] Nelson P G.Suspended low-frequency horizontal pendulum isolator for vibration isolation systems:US5779010 .1998-07-14 [8] Erin C,Wilson B.An improved model of a pneumatic vibration isolator theory and experiment[J].Journal of Sound and Vibration,1998,218(1):81-101 [9] 张鸣.超精密气浮运动台流固耦合模态分析及优化设计 .北京:清华大学精密仪器与机械学系,2005 Zhang Ming.Modal analysis and optimization design for an ultra precision linear motion gas bearing stage using a fluent-structure coupled method .Beijing:Department of Precision Instrument and Mechanology,Tsinghna University,2005(in Chinese) [10] 刘丹,侯之超.三线摆方程简化及其共振问题研究[J].振动与冲击,2007,26:136-139 Liu Dan,Hou Zhichao.Simplification of governing equation of a trifilar pendulum and its resonance problem[J].Journal of Vibration and Shock,2007,26:136-139(in Chinese)
点击查看大图
计量
- 文章访问数: 11044
- HTML全文浏览量: 177
- PDF下载量: 1950
- 被引次数: 0