In order to enhance the stability and reliability of electron beam source system and improve the machining quality of electron beam, the topology circuit of AC-DC-AC-DC-AC-DC, new power transformer, high voltage pulse detection technology, optimized feedback control technology of electron beam and closed-loop control technology of filament current are introduced to optimize high voltage power source, bias voltage power source and filament power source. The inverter power supply, 150 kV/30 kW EB gun, vacuum system and others control system were integrated to establish a set of electron beam system. The high voltage, maximal electron beam output, and the influence of bias voltage and filament current on beam output are tested. The results of a series of tests show that the high voltage output of the inverter power supply has a fine linearity, and the maximum beam output is up to 200 mA at the high voltage output up to-150 kV. At given high voltage and current of filament, the electron beam will increase with the decrease of bias voltage. When the high voltage and bias voltage are given changeless, the electron beam output experiences non-beam phase, linear increasable phase and steady changeless phase with the increase of filament current.